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High order design optimization for microprobe beam optics

Conference ·
OSTI ID:199755
;  [1]
  1. Los Alamos National Lab., NM (United States)
Quadrupole imaging systems for microprobe application are studied using recently developed design capabilities in the Lie-algebraic beam-optics codes Marylie 3.0 and TLIE. Marylie`s rapid computation of third-order transfer maps, coupled with its robust fitting procedure, allows the automatic generation of hundreds of designs meeting specified constraints such as focus and magnification. These samples from the manifold of feasible designs are scanned for optima, based on such criteria as the RMS third-order geometric aberration amplitude, chromatic sensitivity, aperture utilization, etc. Octupole correction, fifth-order aberrations, and achromaticity are considered. Beam tuning for maximum current density in the spot, with a given emittance, is discussed.
OSTI ID:
199755
Report Number(s):
CONF-941129--
Country of Publication:
United States
Language:
English

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