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Uniformity of Aluminum Oxide Barrier Conductivity as Obtained by Ambient Temperature C-AFM Mapping.

Conference ·
DOI:https://doi.org/10.2172/1882369· OSTI ID:1882369

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
OSTI ID:
1882369
Report Number(s):
SAND2020-11405C; 698178
Country of Publication:
United States
Language:
English

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