Sensing depths in frequency domain thermoreflectance

Hodges, Wyatt; Jarzembski, Amun; McDonald, Anthony; Ziade, Elbara; Pickrell, Greg W.

doi:10.1063/5.0088594

Sensing depths in frequency domain thermoreflectance

Journal Article · Wed Jun 22 00:00:00 EDT 2022 · Journal of Applied Physics

DOI:https://doi.org/10.1063/5.0088594· OSTI ID:1877117

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Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Apple, Inc., Cupertino, CA (United States)

In this work, a method is developed to calculate the length into a sample to which a Frequency Domain Thermoreflectance (FDTR) measurement is sensitive. Sensing depth and sensing radius are defined as limiting cases for the spherically spreading FDTR measurement. A finite element model for FDTR measurements is developed in COMSOL multiphysics and used to calculate sensing depth and sensing radius for silicon and silicon dioxide samples for a variety of frequencies and laser spot sizes. The model is compared to experimental FDTR measurements. Design recommendations for sample thickness are made for experiments where semi-infinite sample depth is desirable. For measurements using a metal transducer layer, the recommended sample thickness is three thermal penetration depths, as calculated from the lowest measurement frequency.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States). Center for Integrated Nanotechnologies (CINT)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); USDOE Laboratory Directed Research and Development (LDRD) Program

Grant/Contract Number:: NA0003525

OSTI ID:: 1877117

Alternate ID(s):: OSTI ID: 1873422
OSTI ID: 1877118

Report Number(s):: SAND2022-8139J; 707364

Journal Information:: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 24 Vol. 131; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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