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Elucidating Novel Diffusion Mechanisms during Si/SiGe Oxidation.

Thesis/Dissertation ·
OSTI ID:1875222
Abstract not provided.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
OSTI ID:
1875222
Report Number(s):
SAND2022-9095T; 707997
Country of Publication:
United States
Language:
English

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