Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse magnetic field

Sharma, Sarveshwar; Patil, Sanket; Sengupta, Sudip; Sen, Abhijit; Khrabrov, Alexander; Kaganovich, Igor

doi:10.1063/5.0094409

Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse magnetic field

Journal Article · Wed Jun 01 00:00:00 EDT 2022 · Physics of Plasmas

DOI:https://doi.org/10.1063/5.0094409· OSTI ID:1889112

^[1]; Patil, Sanket ^[2]; ^[1]; Sen, Abhijit ^[1]; ^[3]; ^[3]

Institute for Plasma Research, Gandhinagar (India); Homi Bhabha National Institute, Mumbai (India)
University of Wisconsin, Madison, WI (United States)
Princeton Plasma Physics Lab. (PPPL), Princeton, NJ (United States)

Recently, Patil et al. [Phys. Rev. Res. 4, 013059 (2022)] have reported the existence of an enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge (CCP) is driven by a very high radio frequency (60 MHz) source in the presence of a weak external magnetic field applied parallel to its electrodes. Their particle-in-cell simulations show that a significantly higher bulk plasma density and ion flux can be achieved at the electrode when the electron cyclotron frequency equals half of the applied radio frequency for a given fixed voltage. In the present work, we take a detailed look at this phenomenon and further delineate the effect of this “electron bounce-cyclotron resonance (EBCR)” on the electron and ion dynamics of the system. We find that the ionization collision rate and stochastic heating are maximum under resonance condition. The electron energy distribution function also indicates that the population of tail-end electrons is highest for the case where EBCR is maximum. Formation of electric field transients in the bulk plasma region is also seen at lower values of applied magnetic field. Finally, we demonstrate that the EBCR-induced effect is a low-pressure phenomenon and weakens as the neutral gas pressure increases. The potential utility of this effect to advance the operational performance of CCP devices for industrial purposes is discussed in this report.

View Accepted Manuscript (DOE)

Research Organization:: Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-09CH11466

OSTI ID:: 1889112

Alternate ID(s):: OSTI ID: 1870936

Journal Information:: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 6 Vol. 29; ISSN 1070-664X

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse magnetic field

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