Piezo-optomechanical cantilever modulators for VLSI visible photonics

Dong, Mark; Heim, David; Witte, Alex; Clark, Genevieve; Leenheer, Andrew J.; Dominguez, Daniel; Zimmermann, Matthew; Wen, Y. Henry; Gilbert, Gerald; Englund, Dirk; Eichenfield, Matt

doi:10.1063/5.0088424

Piezo-optomechanical cantilever modulators for VLSI visible photonics

Journal Article · Sun May 01 00:00:00 EDT 2022 · APL Photonics

DOI:https://doi.org/10.1063/5.0088424· OSTI ID:1869741

^[1]; ^[2]; ^[2]; Clark, Genevieve ^[1]; Leenheer, Andrew J. ^[3]; Dominguez, Daniel ^[3]; Zimmermann, Matthew ^[2]; Wen, Y. Henry ^[2]; Gilbert, Gerald ^[4]; ^[5]; Eichenfield, Matt ^[3]

The MITRE Corporation, 202 Burlington Road, Bedford, Massachusetts 01730, USA, Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
The MITRE Corporation, 202 Burlington Road, Bedford, Massachusetts 01730, USA
Sandia National Laboratories, P.O. Box 5800, Albuquerque, New Mexico 87185, USA
The MITRE Corporation, 200 Forrestal Road, Princeton, New Jersey 08540, USA
Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA, Brookhaven National Laboratory, 98 Rochester St., Upton, New York 11973, USA

Visible-wavelength very large-scale integration photonic circuits have a potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible photonic components. Here, we report a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, fabricated on a CMOS compatible, 200 mm wafer-based visible photonics platform. We show linear phase and amplitude modulation with 6 V _π cm in differential operation, −1.5 to −2 dB insertion loss, and up to 40 dB contrast in the 700–780 nm range. By adjusting selected cantilever parameters, we demonstrate a low-displacement and a high-displacement device, both exhibiting a nearly flat frequency response from DC to a peak mechanical resonance at 23 and 6.8 MHz respectively, which, through resonant enhancement of Q ∼ 40, further decreases the operating voltage down to 0.15 V _π cm.

View Accepted Manuscript (Publisher)

Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0012704

OSTI ID:: 1869741

Journal Information:: APL Photonics, Journal Name: APL Photonics Journal Issue: 5 Vol. 7; ISSN 2378-0967

Publisher:: American Institute of PhysicsCopyright Statement

Country of Publication:: United States

Language:: English

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