Shoulder fillet effects in strength distributions of polysilicon MEMS.
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- NA0003525
- OSTI ID:
- 1868006
- Report Number(s):
- SAND2021-5726C; 696120
- Country of Publication:
- United States
- Language:
- English
Similar Records
High-throughput Bend Strengths of Polysilicon MEMS Components.
High-throughput bending strengths of polysilicon MEMS components.
Strength of Polysilicon for MEMS Devices
Conference
·
Fri Oct 01 00:00:00 EDT 2021
·
OSTI ID:1891969
High-throughput bending strengths of polysilicon MEMS components.
Conference
·
Wed Jun 01 00:00:00 EDT 2022
·
OSTI ID:2003565
Strength of Polysilicon for MEMS Devices
Conference
·
Tue Jul 20 00:00:00 EDT 1999
·
OSTI ID:9611