All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications

Varadharajan Idhaiam, Kavin Sivaneri; Caswell, Joshua A.; Pozo, Peter D.; Sabolsky, Katarzyna; Sierros, Konstantinos A.; Reynolds, Daryl S.; Sabolsky, Edward M.

doi:10.3390/s22062165

All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications

Journal Article · Wed Mar 09 23:00:00 EST 2022 · Sensors

DOI:https://doi.org/10.3390/s22062165· OSTI ID:1854399

Varadharajan Idhaiam, Kavin Sivaneri; Caswell, Joshua A.; Pozo, Peter D.; Sabolsky, Katarzyna; Sierros, Konstantinos A.; Reynolds, Daryl S.; Sabolsky, Edward M.

In this work, an all-ceramic passive wireless inductor–capacitor (LC) resonator was presented for stable temperature sensing up to 1200 °C in air. Instead of using conventional metallic electrodes, the LC resonators are modeled and fabricated with thermally stable and highly electroconductive ceramic oxide. The LC resonator was modeled in ANSYS HFSS to operate in a low-frequency region (50 MHz) within 50 × 50 mm geometry using the actual material properties of the circuit elements. The LC resonator was composed of a parallel plate capacitor coupled with a planar inductor deposited on an Al2O3 substrate using screen-printing, and the ceramic pattern was sintered at 1250 °C for 4 h in an ambient atmosphere. The sensitivity (average change in resonant frequency with respect to temperature) from 200–1200 °C was ~170 kHz/°C. The temperature-dependent electrical conductivity of the tin-doped indium oxide (ITO, 10% SnO2 doping) on the quality factor showed an increase of Qf from 36 to 43 between 200 °C and 1200 °C. The proposed ITO electrodes displayed improved sensitivity and quality factor at elevated temperatures, proving them to be an excellent candidate for temperature sensing in harsh environments. The microstructural analysis of the co-sintered LC resonator was performed using a scanning electron microscope (SEM) which showed that there are no cross-sectional and topographical defects after several thermal treatments.

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Sponsoring Organization:: USDOE

Grant/Contract Number:: FE0026171

OSTI ID:: 1854399

Alternate ID(s):: OSTI ID: 1904846

Journal Information:: Sensors, Journal Name: Sensors Journal Issue: 6 Vol. 22; ISSN SENSC9; ISSN 1424-8220

Publisher:: MDPI AGCopyright Statement

Country of Publication:: Switzerland

Language:: English

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