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Hybrid molecular beam epitaxy growth of BaTiO 3 films

Journal Article · · Journal of Vacuum Science and Technology A
DOI:https://doi.org/10.1116/6.0001140· OSTI ID:1853512
 [1];  [2];  [3];  [2];  [4];  [2];  [4];  [3];  [2];  [2]
  1. Univ. of Minnesota, Minneapolis, MN (United States); OSTI
  2. Univ. of Minnesota, Minneapolis, MN (United States)
  3. Univ. of Kiel (Germany)
  4. Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
+ Show Author Affiliations
The ability to reproducibly synthesize thin films with precise composition and controlled structure is essential for fundamental study and mass production. Here, we demonstrate the hybrid molecular beam epitaxy (MBE) growth of epitaxial, single crystalline BaTiO3 films with different thicknesses on Nb-doped SrTiO3 substrates with atomically smooth surfaces. By combining scanning transmission electron microscopy, temperature-dependent high-resolution x-ray diffraction, reflection high-energy electron diffraction, and atomic force microscopy, we study the effect of growth conditions and the interplay between stoichiometry and epitaxial strain on the resulting structure. Furthermore, we demonstrate a close to bulk-like ferroelectric phase transition in thicker films and highlight the effect of strain on the phase transition temperature. This work establishes the hybrid MBE approach for the growth of heteroepitaxial BaTiO3 films on conducting substrates with scalable thickness and controlled stoichiometry.
Research Organization:
Univ. of Minnesota, Minneapolis, MN (United States)
Sponsoring Organization:
USDOE; USDOE Office of Science (SC)
Grant/Contract Number:
SC0020211
OSTI ID:
1853512
Alternate ID(s):
OSTI ID: 1798388
Journal Information:
Journal of Vacuum Science and Technology A, Journal Name: Journal of Vacuum Science and Technology A Journal Issue: 4 Vol. 39; ISSN 0734-2101
Publisher:
American Vacuum Society / AIPCopyright Statement
Country of Publication:
United States
Language:
English

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Related Subjects

Materials Science
Physics