Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

B- and Al- Doped Delta Layers in Si Using Halogen-Based Precursors.

Conference ·
DOI:https://doi.org/10.2172/1831356· OSTI ID:1831356

Abstract not provided.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
OSTI ID:
1831356
Report Number(s):
SAND2020-12637C; 692183
Resource Relation:
Conference: Proposed for presentation at the 2020 Virtual MRS Fall Meeting & Exhibit held November 27 - December 4, 2020.
Country of Publication:
United States
Language:
English