Size and structural characterization of Si nanocrystal aggregates from a low pressure nonthermal plasma reactor

Chen, Xiaoshuang; Seto, Takafumi; Kortshagen, Uwe R.; Hogan, Christopher J.

doi:10.1016/j.powtec.2020.06.026

Size and structural characterization of Si nanocrystal aggregates from a low pressure nonthermal plasma reactor

Journal Article · Mon Jun 22 00:00:00 EDT 2020 · Powder Technology

DOI:https://doi.org/10.1016/j.powtec.2020.06.026· OSTI ID:1820658

^[1]; Seto, Takafumi ^[2]; Kortshagen, Uwe R. ^[3]; ^[3]

Univ. of Minnesota, Minneapolis, MN (United States); University of Minnesota
Kanazawa Univ. (Japan)
Univ. of Minnesota, Minneapolis, MN (United States)

Si nanocrystals (NCs) are synthesizable in low-pressure plasmas with narrow diameter distributions because of unipolar negative charging in the plasma. However, NCs must pass into a spatial afterglow, where NCs may decharge and aggregate. We use both low-pressure differential mobility analysis and quantitative TEM image analysis to examine Si NCs sampled from a 2 Torr Ar-SiH4 plasma reactor. We find that Si NCs are incorporated into aggregates largely composed of 20 and fewer primary particles with nearly equal concentrations of negatively and positively charged NCs. The projected areas of aggregates scale with aggregate volume in similar manner to the scaling observed for aggregates from atmospheric pressure systems. Higher aggregate concentration is observed with increasing flow rate, while larger aggregate size is found with increasing precursor concentration. Measurements show that the spatial afterglow has a significant influence on the charge and extent of NC aggregation.

View Accepted Manuscript (DOE)

Research Organization:: University of Minnesota, Minneapolis, MN (United States)

Sponsoring Organization:: USDOE; USDOE Office of Science (SC)

Grant/Contract Number:: SC0018202

OSTI ID:: 1820658

Alternate ID(s):: OSTI ID: 1803298
OSTI ID: 1635591

Journal Information:: Powder Technology, Journal Name: Powder Technology Vol. 373; ISSN 0032-5910

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

References (79)

Induction Plasma Synthesis of Carbide Nano-Powders Leparoux, M.; Schreuders, C.; Shin, J. -W. Advanced Engineering Materials, Vol. 7, Issue 5 https://doi.org/10.1002/adem.200500046	journal	May 2005
Nanostructured photoactive films synthesized by a flame aerosol reactor Thimsen, Elijah; Biswas, Pratim AIChE Journal, Vol. 53, Issue 7 https://doi.org/10.1002/aic.11210	journal	January 2007
Fractal-like Aggregates: Relation between Morphology and Physical Properties Filippov, A. V.; Zurita, M.; Rosner, D. E. Journal of Colloid and Interface Science, Vol. 229, Issue 1 https://doi.org/10.1006/jcis.2000.7027	journal	September 2000
Nonthermal Plasma Synthesis of Nanocrystals: Fundamentals, Applications, and Future Research Needs Kortshagen, Uwe Plasma Chemistry and Plasma Processing, Vol. 36, Issue 1 https://doi.org/10.1007/s11090-015-9663-4	journal	September 2015
The Collision Cross Sections of Iodide Salt Cluster Ions in Air via Differential Mobility Analysis-Mass Spectrometry Ouyang, Hui; Larriba-Andaluz, Carlos; Oberreit, Derek R. Journal of The American Society for Mass Spectrometry, Vol. 24, Issue 12 https://doi.org/10.1007/s13361-013-0724-8	journal	September 2013
Aerosol classification by electric mobility: apparatus, theory, and applications Knutson, E. O.; Whitby, K. T. Journal of Aerosol Science, Vol. 6, Issue 6 https://doi.org/10.1016/0021-8502(75)90060-9	journal	November 1975
Preparation of gas sensitive film by deposition of ultrafine tin dioxide particles Adachi, M.; Okuyama, K.; Kousaka, Y. Journal of Aerosol Science, Vol. 19, Issue 2 https://doi.org/10.1016/0021-8502(88)90227-3	journal	April 1988
An approximation of the bipolar charge distribution for particles in the submicron size range Wiedensohler, A. Journal of Aerosol Science, Vol. 19, Issue 3 https://doi.org/10.1016/0021-8502(88)90278-9	journal	June 1988
Size analysis in low-pressure nanoparticle reactors: comparison of particle mass spectrometry with in situ probing transmission electron microscopy Janzen, C.; Kleinwechter, H.; Knipping, J. Journal of Aerosol Science, Vol. 33, Issue 6 https://doi.org/10.1016/S0021-8502(02)00048-4	journal	June 2002
Size distribution measurement of nanometer-sized aerosol particles using dma under low-pressure conditions Seto, Takafumi; Nakamoto, Tatsuya; Okuyama, Kikuo Journal of Aerosol Science, Vol. 28, Issue 2 https://doi.org/10.1016/S0021-8502(96)00071-7	journal	March 1997
Nanostructured materials production by hypersonic plasma particle deposition Rao, N. P.; Lee, H. J.; Kelkar, M. Nanostructured Materials, Vol. 9, Issue 1-8 https://doi.org/10.1016/S0965-9773(97)00035-4	journal	January 1997
Mobility size distributions of soot in premixed propene flames Lin, He; Gu, Chen; Camacho, Joaquin Combustion and Flame, Vol. 172 https://doi.org/10.1016/j.combustflame.2016.07.002	journal	October 2016
Porous particulate film deposition in the transition regime Lindquist, Gustaf J.; Pui, David Y. H.; Hogan, Christopher J. Journal of Aerosol Science, Vol. 74 https://doi.org/10.1016/j.jaerosci.2014.03.007	journal	August 2014
The mobilities of flame synthesized aggregates/agglomerates in the transition regime Thajudeen, Thaseem; Jeon, Seongho; Hogan, Christopher J. Journal of Aerosol Science, Vol. 80 https://doi.org/10.1016/j.jaerosci.2014.11.003	journal	February 2015
Ejector-based sampling from low-pressure aerosol reactors Rosenberger, Thore; Münzer, Adrian; Kiesler, Dennis Journal of Aerosol Science, Vol. 123 https://doi.org/10.1016/j.jaerosci.2018.06.003	journal	September 2018
Detailed characterisation of TiO2 nano-aggregate morphology using TEM image analysis Manuputty, Manoel Y.; Lindberg, Casper S.; Botero, Maria L. Journal of Aerosol Science, Vol. 133 https://doi.org/10.1016/j.jaerosci.2019.04.012	journal	July 2019
Analysis of ultrafine metal oxide particles in aerosols using mobility-resolved time-of-flight mass spectrometry Domaschke, Maximilian; Lübbert, Christian; Peukert, Wolfgang Journal of Aerosol Science, Vol. 137 https://doi.org/10.1016/j.jaerosci.2019.105438	journal	November 2019
Comparison of the predictions of Langevin Dynamics-based diffusion charging collision kernel models with canonical experiments Li, Li; Chahl, Harjindar Singh; Gopalakrishnan, Ranganathan Journal of Aerosol Science, Vol. 140 https://doi.org/10.1016/j.jaerosci.2019.105481	journal	February 2020
High resolution Varying Field Drift Tube Ion Mobility Spectrometer with diffusion autocorrection Chen, Xi; Gandhi, Viraj; Coots, Joshua Journal of Aerosol Science, Vol. 140 https://doi.org/10.1016/j.jaerosci.2019.105485	journal	February 2020
Contact behavior of size fractionated TiO2 nanoparticle agglomerates and aggregates Salameh, Samir; Scholz, Rebecca; Seo, Jin Won Powder Technology, Vol. 256 https://doi.org/10.1016/j.powtec.2014.02.042	journal	April 2014
Automated primary particle sizing of nanoparticle aggregates by TEM image analysis Dastanpour, Ramin; Boone, Jocelyne M.; Rogak, Steven N. Powder Technology, Vol. 295 https://doi.org/10.1016/j.powtec.2016.03.027	journal	July 2016
Synthesis of silicon nanoparticles in a pilot-plant-scale microwave plasma reactor: Impact of flow rates and precursor concentration on the nanoparticle size and aggregation Kunze, Frederik; Kuns, Stefan; Spree, Mathias Powder Technology, Vol. 342 https://doi.org/10.1016/j.powtec.2018.10.042	journal	January 2019
Image-based size analysis of agglomerated and partially sintered particles via convolutional neural networks Frei, M.; Kruis, F. E. Powder Technology, Vol. 360 https://doi.org/10.1016/j.powtec.2019.10.020	journal	January 2020
Serpentine Ultralong Path with Extended Routing (SUPER) High Resolution Traveling Wave Ion Mobility-MS using Structures for Lossless Ion Manipulations Deng, Liulin; Webb, Ian K.; Garimella, Sandilya V. B. Analytical Chemistry, Vol. 89, Issue 8 https://doi.org/10.1021/acs.analchem.7b00185	journal	April 2017
Aerosol-Phase Synthesis and Processing of Luminescent Silicon Nanocrystals Li, Zhaohan; Kortshagen, Uwe R. Chemistry of Materials, Vol. 31, Issue 20 https://doi.org/10.1021/acs.chemmater.9b02743	journal	September 2019
Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications Kortshagen, Uwe R.; Sankaran, R. Mohan; Pereira, Rui N. Chemical Reviews, Vol. 116, Issue 18 https://doi.org/10.1021/acs.chemrev.6b00039	journal	August 2016
A Non-Thermal Plasma Route to Plasmonic TiN Nanoparticles Alvarez Barragan, Alejandro; Ilawe, Niranjan V.; Zhong, Lanlan The Journal of Physical Chemistry C, Vol. 121, Issue 4 https://doi.org/10.1021/acs.jpcc.6b08910	journal	January 2017
Visualizing Current Flow at the Mesoscale in Disordered Assemblies of Touching Semiconductor Nanocrystals Chen, Qinyi; Guest, Jeffrey R.; Thimsen, Elijah The Journal of Physical Chemistry C, Vol. 121, Issue 29 https://doi.org/10.1021/acs.jpcc.7b04949	journal	July 2017
Nonequilibrium Plasma Aerotaxy of InN Nanocrystals and Their Photonic Properties Uner, Necip B.; Niedzwiedzki, Dariusz M.; Thimsen, Elijah The Journal of Physical Chemistry C, Vol. 123, Issue 50 https://doi.org/10.1021/acs.jpcc.9b09555	journal	November 2019
Aerosol Impaction-Driven Assembly System for the Production of Uniform Nanoparticle Thin Films with Independently Tunable Thickness and Porosity Firth, Peter; Holman, Zachary C. ACS Applied Nano Materials, Vol. 1, Issue 8 https://doi.org/10.1021/acsanm.8b01334	journal	July 2018
Surface Chemistry of Aerosolized Silicon Nanoparticles: Evolution and Desorption of Hydrogen from 6-nm Diameter Particles Holm, Jason; Roberts, Jeffrey T. Journal of the American Chemical Society, Vol. 129, Issue 9 https://doi.org/10.1021/ja0658970	journal	March 2007
Light scattering from simulated smoke agglomerates Mountain, Raymond D.; Mulholland, G. W. Langmuir, Vol. 4, Issue 6 https://doi.org/10.1021/la00084a021	journal	November 1988
High-Yield Plasma Synthesis of Luminescent Silicon Nanocrystals Mangolini, L.; Thimsen, E.; Kortshagen, U. Nano Letters, Vol. 5, Issue 4 https://doi.org/10.1021/nl050066y	journal	April 2005
Universality in colloid aggregation Lin, M. Y.; Lindsay, H. M.; Weitz, D. A. Nature, Vol. 339, Issue 6223 https://doi.org/10.1038/339360a0	journal	June 1989
High electron mobility in thin films formed via supersonic impact deposition of nanocrystals synthesized in nonthermal plasmas Thimsen, Elijah; Johnson, Melissa; Zhang, Xin Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms6822	journal	December 2014
Gas molecule scattering & ion mobility measurements for organic macro-ions in He versus N ₂ environments Larriba-Andaluz, Carlos; Fernández-García, Juan; Ewing, Michael A. Physical Chemistry Chemical Physics, Vol. 17, Issue 22 https://doi.org/10.1039/C5CP01017A	journal	January 2015
Self-assembly dynamics and accumulation mechanisms of ultra-fine nanoparticles Nasiri, Noushin; Elmøe, Tobias D.; Liu, Yun Nanoscale, Vol. 7, Issue 21 https://doi.org/10.1039/C5NR00877H	journal	January 2015
Nanocrystal size distribution analysis from transmission electron microscopy images van Sebille, Martijn; van der Maaten, Laurens J. P.; Xie, Ling Nanoscale, Vol. 7, Issue 48 https://doi.org/10.1039/C5NR06292F	journal	January 2015
Ion mobility spectrometry-mass spectrometry examination of the structures, stabilities, and extents of hydration of dimethylamine–sulfuric acid clusters Thomas, Jikku M.; He, Siqin; Larriba-Andaluz, Carlos Physical Chemistry Chemical Physics, Vol. 18, Issue 33 https://doi.org/10.1039/C6CP03432B	journal	January 2016
Quantifying intra- and extracellular aggregation of iron oxide nanoparticles and its influence on specific absorption rate Jeon, Seongho; Hurley, Katie R.; Bischof, John C. Nanoscale, Vol. 8, Issue 35 https://doi.org/10.1039/C6NR04042J	journal	January 2016
Intra- and inter-nanocrystal charge transport in nanocrystal films Aigner, Willi; Bienek, Oliver; Falcão, Bruno P. Nanoscale, Vol. 10, Issue 17 https://doi.org/10.1039/C8NR00250A	journal	January 2018
Ion beam charging of silicon nanoparticles in helium background gas: Design of the ion beam aerosol charger Seto, Takafumi; Orii, Takaaki; Hirasawa, Makoto Review of Scientific Instruments, Vol. 74, Issue 6 https://doi.org/10.1063/1.1575922	journal	June 2003
Nonthermal plasma synthesis of size-controlled, monodisperse, freestanding germanium nanocrystals Gresback, Ryan; Holman, Zachary; Kortshagen, Uwe Applied Physics Letters, Vol. 91, Issue 9 https://doi.org/10.1063/1.2778356	journal	August 2007
Influence of the ambipolar-to-free diffusion transition on dust particle charge in a complex plasma afterglow Couëdel, L.; Samarian, A. A.; Mikikian, M. Physics of Plasmas, Vol. 15, Issue 6 https://doi.org/10.1063/1.2938387	journal	June 2008
The role of negative ions in the formation of particles in low‐pressure plasmas Choi, Seung J.; Kushner, Mark J. Journal of Applied Physics, Vol. 74, Issue 2 https://doi.org/10.1063/1.354877	journal	July 1993
Particle charging in low‐pressure plasmas Matsoukas, Themis; Russell, Marc Journal of Applied Physics, Vol. 77, Issue 9 https://doi.org/10.1063/1.359451	journal	May 1995
Collision limited reaction rates for arbitrarily shaped particles across the entire diffusive Knudsen number range Gopalakrishnan, Ranganathan; Thajudeen, Thaseem; Hogan, Christopher J. The Journal of Chemical Physics, Vol. 135, Issue 5 https://doi.org/10.1063/1.3617251	journal	August 2011
The effects of restructuring on the geometry of clusters formed by diffusion‐limited, ballistic, and reaction‐limited cluster–cluster aggregation Meakin, Paul; Jullien, Remi The Journal of Chemical Physics, Vol. 89, Issue 1 https://doi.org/10.1063/1.455517	journal	July 1988
Measurement of sub-2 nm stable clusters during silane pyrolysis in a furnace aerosol reactor Vazquez-Pufleau, Miguel; Wang, Yang; Biswas, Pratim The Journal of Chemical Physics, Vol. 152, Issue 2 https://doi.org/10.1063/1.5124996	journal	January 2020
Ion Beam Charging of Aerosol Nanoparticles Seto, Takafumi; Orii, Takaaki; Sakurai, Hiromu Aerosol Science and Technology, Vol. 39, Issue 8 https://doi.org/10.1080/02786820500212748	journal	August 2005
Performance of Nano-DMA Operated with Different Gases for Sheath and Aerosol Carrier Flows Li, Weiling; Chen, Da-Ren Aerosol Science and Technology, Vol. 39, Issue 10 https://doi.org/10.1080/02786820500346520	journal	October 2005
The Mobility–Volume Relationship below 3.0 nm Examined by Tandem Mobility–Mass Measurement Larriba, Carlos; Hogan, Christopher J.; Attoui, Michel Aerosol Science and Technology, Vol. 45, Issue 4 https://doi.org/10.1080/02786826.2010.546820	journal	March 2011
Determination of the Scalar Friction Factor for Nonspherical Particles and Aggregates Across the Entire Knudsen Number Range by Direct Simulation Monte Carlo (DSMC) Zhang, Chonglin; Thajudeen, Thaseem; Larriba, Carlos Aerosol Science and Technology, Vol. 46, Issue 10 https://doi.org/10.1080/02786826.2012.690543	journal	October 2012
Langevin Simulation of Aggregate Formation in the Transition Regime Thajudeen, Thaseem; Deshmukh, Suhrid; Hogan, Christopher J. Aerosol Science and Technology, Vol. 49, Issue 2 https://doi.org/10.1080/02786826.2015.1008971	journal	February 2015
Improving Twomey's Algorithm for Inversion of Aerosol Measurement Data Markowski, Gregory R. Aerosol Science and Technology, Vol. 7, Issue 2 https://doi.org/10.1080/02786828708959153	journal	January 1987
The Mobility and Structure of Aerosol Agglomerates Rogak, Steven N.; Flagan, Richard C.; Nguyen, Hung V. Aerosol Science and Technology, Vol. 18, Issue 1 https://doi.org/10.1080/02786829308959582	journal	January 1993
Negative hydrogenated silicon ion clusters as particle precursors in RF silane plasma deposition experiments Howling, A. A.; Sansonnens, L.; Dorier, J. -L Journal of Physics D: Applied Physics, Vol. 26, Issue 6 https://doi.org/10.1088/0022-3727/26/6/019	journal	June 1993
Modelling of silicon hydride clustering in a low-pressure silane plasma Bhandarkar, U. V.; Swihart, M. T.; Girshick, S. L. Journal of Physics D: Applied Physics, Vol. 33, Issue 21 https://doi.org/10.1088/0022-3727/33/21/311	journal	October 2000
Cluster beam deposition: a tool for nanoscale science and technology Wegner, K.; Piseri, P.; Tafreshi, H. Vahedi Journal of Physics D: Applied Physics, Vol. 39, Issue 22 https://doi.org/10.1088/0022-3727/39/22/R02	journal	November 2006
Atmospheric-pressure dielectric barrier discharge with capillary injection for gas-phase nanoparticle synthesis Ghosh, Souvik; Liu, Tianqi; Bilici, Mihai Journal of Physics D: Applied Physics, Vol. 48, Issue 31 https://doi.org/10.1088/0022-3727/48/31/314003	journal	July 2015
One-step aerosol synthesis of nanoparticle agglomerate films: simulation of film porosity and thickness Mädler, Lutz; Lall, Anshuman A.; Friedlander, Sheldon K. Nanotechnology, Vol. 17, Issue 19 https://doi.org/10.1088/0957-4484/17/19/001	journal	September 2006
A flexible method for depositing dense nanocrystal thin films: impaction of germanium nanocrystals Holman, Z. C.; Kortshagen, U. R. Nanotechnology, Vol. 21, Issue 33 https://doi.org/10.1088/0957-4484/21/33/335302	journal	July 2010
Ligand-free Ni nanocluster formation at atmospheric pressure via rapid quenching in a microplasma process Kumar, Ajay; Kang, Seungkoo; Larriba-Andaluz, Carlos Nanotechnology, Vol. 25, Issue 38 https://doi.org/10.1088/0957-4484/25/38/385601	journal	September 2014
Definitive equations for the fluid resistance of spheres Davies, C. N. Proceedings of the Physical Society, Vol. 57, Issue 4 https://doi.org/10.1088/0959-5309/57/4/301	journal	July 1945
Monitoring non-thermal plasma processes for nanoparticle synthesis Mangolini, Lorenzo Journal of Physics D: Applied Physics, Vol. 50, Issue 37 https://doi.org/10.1088/1361-6463/aa812e	journal	August 2017
Characterization of the state of nanoparticle aggregation in non-equilibrium plasma synthesis systems Chen, Xiaoshuang; Ghosh, Souvik; Buckley, David T. Journal of Physics D: Applied Physics, Vol. 51, Issue 33 https://doi.org/10.1088/1361-6463/aad26f	journal	July 2018
The charge of micro-particles in a low pressure spatial plasma afterglow van Minderhout, B.; Peijnenburg, T.; Blom, P. Journal of Physics D: Applied Physics, Vol. 52, Issue 32 https://doi.org/10.1088/1361-6463/ab2525	journal	June 2019
Nonequilibrium plasma aerotaxy of size controlled GaN nanocrystals Uner, Necip B.; Thimsen, Elijah Journal of Physics D: Applied Physics, Vol. 53, Issue 9 https://doi.org/10.1088/1361-6463/ab59e6	journal	December 2019
Electrostatic enhancement factor for the coagulation of silicon nanoparticles in low-temperature plasmas Santos, Benjamin; Cacot, Laura; Boucher, Claude Plasma Sources Science and Technology, Vol. 28, Issue 4 https://doi.org/10.1088/1361-6595/ab0a2b	journal	April 2019
Determination of nanoparticle collision cross section distribution functions in low pressure plasma synthesis reactors via ion mobility spectrometry Chen, Xiaoshuang; Seto, Takafumi; Kortshagen, Uwe R. Nano Futures, Vol. 3, Issue 1 https://doi.org/10.1088/2399-1984/aaff97	journal	February 2019
Modeling of particulate coagulation in low pressure plasmas Kortshagen, U.; Bhandarkar, U. Physical Review E, Vol. 60, Issue 1 https://doi.org/10.1103/PhysRevE.60.887	journal	July 1999
Analytical model of particle charging in plasmas over a wide range of collisionality Gatti, Marco; Kortshagen, Uwe Physical Review E, Vol. 78, Issue 4 https://doi.org/10.1103/PhysRevE.78.046402	journal	October 2008
Selective nanoparticle heating: Another form of nonequilibrium in dusty plasmas Mangolini, Lorenzo; Kortshagen, Uwe Physical Review E, Vol. 79, Issue 2 https://doi.org/10.1103/PhysRevE.79.026405	journal	February 2009
Fractal Structures Formed by Kinetic Aggregation of Aqueous Gold Colloids Weitz, D. A.; Oliveria, M. Physical Review Letters, Vol. 52, Issue 16 https://doi.org/10.1103/PhysRevLett.52.1433	journal	April 1984
Spray deposition of nanostructured metal films using hydrodynamically stabilized, high pressure microplasmas Koh, Travis L.; Gordon, Michael J. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 31, Issue 6 https://doi.org/10.1116/1.4825129	journal	November 2013
Particle nucleation and growth in dusty plasmas: On the importance of charged-neutral interactions Girshick, Steven L. Journal of Vacuum Science & Technology A, Vol. 38, Issue 1 https://doi.org/10.1116/1.5136337	journal	January 2020
Chainlike Formation of Particle Deposits in Fluid-Particle Separation Tien, C.; Wang, C. -S.; Barot, D. T. Science, Vol. 196, Issue 4293 https://doi.org/10.1126/science.196.4293.983	journal	May 1977
Synthesis of High Purity Silicon Nanoparticles in a Low Pressure Microwave Reactor Knipping, Jörg; Wiggers, Hartmut; Rellinghaus, Bernd Journal of Nanoscience and Nanotechnology, Vol. 4, Issue 8 https://doi.org/10.1166/jnn.2004.149	journal	November 2004
Laser ablation of nanoparticles and nanoparticulate, thick Fe _1.92 Tb _0.3 Dy _0.7 films Ma, J.; Becker, M. F.; Keto, J. W. Journal of Materials Research, Vol. 25, Issue 9 https://doi.org/10.1557/JMR.2010.0234	journal	September 2010

Similar Records

Nanoparticle dynamics in the spatial afterglows of nonthermal plasma synthesis reactors

Journal Article · Sun Jan 03 19:00:00 EST 2021 · Chemical Engineering Journal · OSTI ID:1820652

Determination of nanoparticle collision cross section distribution functions in low pressure plasma synthesis reactors via ion mobility spectrometry

Journal Article · Wed Feb 06 19:00:00 EST 2019 · Nano Futures · OSTI ID:1598464

Charging mechanism in a SiO{sub 2} matrix embedded with Si nanocrystals

Journal Article · Tue Oct 31 23:00:00 EST 2006 · Journal of Applied Physics · OSTI ID:20884813

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
aggregation
differential mobility analysis
nanocrystal
nonthermal plasma
spatial afterglow

Size and structural characterization of Si nanocrystal aggregates from a low pressure nonthermal plasma reactor

Citation Formats

References (79)

Similar Records

Related Subjects