Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride

Nejadriahi, Hani; Pappert, Steve; Fainman, Yeshaiahu; Yu, Paul

doi:10.1364/OL.431757

Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride

Journal Article · Tue Sep 14 00:00:00 EDT 2021 · Optics Letters

DOI:https://doi.org/10.1364/OL.431757· OSTI ID:1819771

; Pappert, Steve; Fainman, Yeshaiahu; Yu, Paul

The design, fabrication, and characterization of low-loss ultra-compact bends in high-index ( $n = 3.1$ at $λ <#comment/> = 1550 n m$ ) plasma-enhanced chemical vapor deposition silicon-rich silicon nitride (SRN) were demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends were structured into a folded waveguide geometry to form a rectangular spiral within an area of $65 \times <#comment/> 65 µ <#comment/> m^{2}$ , having a total active waveguide length of 1.2 mm. The device featured a phase-shifting efficiency of $8 m W / π <#comment/>$ and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform that combines the properties of silicon and stoichiometric silicon nitride.

View Accepted Manuscript (Publisher)

Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0019273

OSTI ID:: 1819771

Journal Information:: Optics Letters, Journal Name: Optics Letters Journal Issue: 18 Vol. 46; ISSN OPLEDP; ISSN 0146-9592

Publisher:: Optical Society of AmericaCopyright Statement

Country of Publication:: United States

Language:: English

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