Grazing-incidence X-ray diffraction tomography for characterizing organic thin films

Tsai, Esther H. R.; Xia, Yu; Fukuto, Masafumi; Loo, Yueh-Lin; Li, Ruipeng

doi:10.1107/S1600576721007184

Grazing-incidence X-ray diffraction tomography for characterizing organic thin films

Journal Article · Sat Sep 04 00:00:00 EDT 2021 · Journal of Applied Crystallography (Online)

DOI:https://doi.org/10.1107/S1600576721007184· OSTI ID:1818837

; Xia, Yu; Fukuto, Masafumi; Loo, Yueh-Lin; Li, Ruipeng

Characterization of thin films is of paramount importance for evaluating material processing outcomes/efficiency as well as establishing structure–property/performance relationships. This article introduces grazing-incidence diffraction tomography (GID tomography), a technique that combines grazing-incidence X-ray scattering and computed tomography to quantitatively determine the dimension and orientation of crystalline domains in thin films without restrictions on the beam coherence, substrate type or film thickness. This computational method extends the capability of synchrotron beamlines by utilizing standard X-ray scattering experiment setups.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: National Science Foundation (NSF); USDOE; USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: SC0012704

OSTI ID:: 1818837

Alternate ID(s):: OSTI ID: 1827156

Report Number(s):: BNL-222265-2021-JAAM; PII: S1600576721007184

Journal Information:: Journal of Applied Crystallography (Online), Journal Name: Journal of Applied Crystallography (Online) Journal Issue: 5 Vol. 54; ISSN JACGAR; ISSN 1600-5767

Publisher:: International Union of Crystallography (IUCr)Copyright Statement

Country of Publication:: Denmark

Language:: English

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