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Fabrication of OMT-Coupled Kinetic Inductance Detector for CMB Detection

Journal Article · · Journal of Low Temperature Physics
 [1];  [2];  [2];  [1]
  1. Univ. of Illinois, Chicago, IL (United States)
  2. Argonne National Lab. (ANL), Argonne, IL (United States)
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Future cosmic microwave background (CMB) experiments, including the large scale ground-based Stage Four CMB Experiment (CMB-S4), satellites, and balloons, aim to map the CMB to an unprecedented precision in order to answer several key questions in cosmology. However, to reach the target noise sensitivity, more than 100,000 detectors will be needed. Arrays of kinetic inductance detectors (KIDs) are a promising alternative for experiments that require large number of detectors due to the intrinsic multiplexing capabilities. We present the fabrication procedure for a prototype planar orthomode transducer (OMT)-coupled multi-color KID array optimized for 220/270 GHz frequency bands. These devices are made from silicon-on-insulator wafers to provide a low-loss substrate for the KIDs. The OMT couples the two polarizations of light from a wide-band feedhorn to separate Nb/SiN/Nb microstrip lines, which are then coupled to Al/Nb lumped-element KIDs (LEKIDs). The silicon on the backside of the OMT is etched away using deep reactive ion etch to release the OMT membrane to enable operation over a wide bandwidth. Finally, the buried oxide is removed underneath the KID capacitors in order to minimize two-level system noise and loss mitigation. We achieved a good yield (> 80%) on our prototype devices.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE; National Science Foundation (NSF); Kavli Foundation
Grant/Contract Number:
AC02-06CH11357
OSTI ID:
1817183
Journal Information:
Journal of Low Temperature Physics, Journal Name: Journal of Low Temperature Physics Journal Issue: 1-2 Vol. 199; ISSN 0022-2291
Publisher:
SpringerCopyright Statement
Country of Publication:
United States
Language:
English

References (9)

The NIKA2 Instrument at 30-m IRAM Telescope: Performance and Results journal March 2018
Design and Performance of the Antenna-Coupled Lumped-Element Kinetic Inductance Detector journal May 2018
Millimeter-Wave Polarimeters Using Kinetic Inductance Detectors for TolTEC and Beyond journal May 2018
Polarization sensitive Multi-Chroic MKIDs conference July 2016
Design and characterization of a balloon-borne diffraction-limited submillimeter telescope platform for BLAST-TNG conference July 2018
MKID development for SuperSpec: an on-chip, mm-wave, filter-bank spectrometer conference September 2012
Polarization Sensitive Multi-Chroic MKIDs text January 2016
Design and performance of the antenna coupled lumped-element kinetic inductance detector text January 2018
Millimeter-Wave Polarimeters Using Kinetic Inductance Detectors for TolTEC and Beyond text January 2018

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Related Subjects

47 OTHER INSTRUMENTATION
cosmic microwave background
fabrication
kinetic inductance detector