Kirigami Engineering—Nanoscale Structures Exhibiting a Range of Controllable 3D Configurations

Zhang, Xu; Medina, Lior; Cai, Haogang; Aksyuk, Vladimir; Espinosa, Horacio D.; Lopez, Daniel

doi:10.1002/adma.202005275

Kirigami Engineering—Nanoscale Structures Exhibiting a Range of Controllable 3D Configurations

Journal Article · Tue Dec 22 00:00:00 EST 2020 · Advanced Materials

DOI:https://doi.org/10.1002/adma.202005275· OSTI ID:1804250

Zhang, Xu ^[1]; Medina, Lior ^[2]; Cai, Haogang ^[3]; Aksyuk, Vladimir ^[4]; ^[2]; Lopez, Daniel ^[5]

Department of Electrical and Computer Engineering Carnegie Mellon University Pittsburgh PA 15213 USA
Department of Mechanical Engineering Northwestern University Evanston IL 60208 USA, Theoretical and Applied Mechanics Northwestern University Evanston IL 60208 USA
Tech4Health Institute and Department of Radiology NYU Langone Health New York NY 10016 USA
Microsystems and Nanotechnology Division National Institute of Standards and Technology Gaithersburg MD 20899 USA
Department of Electrical Engineering and Materials Research Institute Penn State University University Park PA 16802 USA

Abstract

Kirigami structures provide a promising approach to transform flat films into 3D complex structures that are difficult to achieve by conventional fabrication approaches. By designing the cutting geometry, it is shown that distinct buckling‐induced out‐of‐plane configurations can be obtained, separated by a sharp transition characterized by a critical geometric dimension of the structures. In situ electron microscopy experiments reveal the effect of the ratio between the in‐plane cut size and film thickness on out‐of‐plane configurations. Moreover, geometrically nonlinear finite element analyses (FEA) accurately predict the out‐of‐plane modes measured experimentally, their transition as a function of cut geometry, and provide the stress–strain response of the kirigami structures. The combined computational–experimental approach and results reported here represent a step forward in the characterization of thin films experiencing buckling‐induced out‐of‐plane shape transformations and provide a path to control 3D configurations of micro‐ and nanoscale buckling‐induced kirigami structures. The out‐of‐plane configurations promise great utility in the creation of micro‐ and nanoscale systems that can harness such structural behavior, such as optical scanning micromirrors, novel actuators, and nanorobotics. This work is of particular significance as the kirigami dimensions approach the sub‐micrometer scale which is challenging to achieve with conventional micro‐electromechanical system technologies.

View Accepted Manuscript (Publisher)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1804250

Journal Information:: Advanced Materials, Journal Name: Advanced Materials Journal Issue: 5 Vol. 33; ISSN 0935-9648

Publisher:: Wiley Blackwell (John Wiley & Sons)Copyright Statement

Country of Publication:: Germany

Language:: English

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