Dielectric metasurfaces made from vertically oriented nanoresonators

Gennaro, Sylvain D.; Goldflam, Michael; Burckel, D. Bruce; Jeong, Jeeyoon; Sinclair, Michael B.; Brener, Igal

doi:10.1364/JOSAB.424442

Dielectric metasurfaces made from vertically oriented nanoresonators

Journal Article · Tue Jun 29 00:00:00 EDT 2021 · Journal of the Optical Society of America. Part B, Optical Physics

DOI:https://doi.org/10.1364/JOSAB.424442· OSTI ID:1798949

; Goldflam, Michael; ; Jeong, Jeeyoon; Sinclair, Michael B.; Brener, Igal

Dielectric metasurfaces control optical wavefronts via nanoscale resonators laid out across a surface. However, most metasurfaces are, by design, planar. In this work, we demonstrate the ability to fabricate dielectric metasurfaces with vertically oriented dielectric resonators using membrane projection lithography. We first numerically characterize the resonant modes of an array of vertically oriented germanium ellipses with no substrate and identify a narrowband region where the resonators satisfy the first Kerker condition. We then fabricate seven metasurfaces by depositing germanium ellipses onto walls of a 3D micrometer-sized silicon nitride photonic scaffold and characterize their transmission. We find that signatures of the multipolar modes seen in the unsupported array persist in the supported array, but the overall behavior is more complicated due to the scaffold. Further, we show that for a conceptual metasurface containing two coupled, vertically oriented ellipses, the ellipses can generate a sharp resonance with a quality factor of 240.

View Accepted Manuscript (Publisher)

Sponsoring Organization:: USDOE

OSTI ID:: 1798949

Journal Information:: Journal of the Optical Society of America. Part B, Optical Physics, Journal Name: Journal of the Optical Society of America. Part B, Optical Physics Journal Issue: 9 Vol. 38; ISSN JOBPDE; ISSN 0740-3224

Publisher:: Optical Society of AmericaCopyright Statement

Country of Publication:: United States

Language:: English

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