On the interpretation of complex atomic spectra by means of the parametric Racah–Slater method and Cowan codes 1 This article is part of a Special Issue on the 10th International Colloquium on Atomic Spectra and Oscillator Strengths for Astrophysical and Laboratory Plasmas.
|
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An equation of state for partially ionized plasmas: The Coulomb contribution to the free energy
|
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Opacity of neutral and low ion stages of Sn at the wavelength 13.5 nm used in extreme-ultraviolet lithography
|
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Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography
|
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Spectra of W VIII and W IX in the EUV Region
|
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Modeling of EUV emission from xenon and tin plasma sources for nanolithography
|
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Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source
|
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Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling
|
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Temperatures in non-LTE hot plasmas
|
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Configuration interaction in charge exchange spectra of tin and xenon
|
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Soft X-ray tomography and cryogenic light microscopy: the cool combination in cellular imaging
|
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Rb-like spectra: Pd x to Nd xxiv
|
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January 1992 |
Radiation-hydrodynamics, spectral, and atomic physics modeling of laser-produced plasma EUVL light sources
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May 2005 |
Atomic structure considerations for the low-temperature opacity of Sn
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The effect of an ambient radiation field on the state of ionization in a laser-produced plasma
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July 1995 |
Checking the validity of Busquet's ionization temperature with detailed collisional radiative models
|
journal
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Effective temperatures in hot dense plasmas
|
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|
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EUV spectroscopy of highly charged ions in an electron-beam ion trap
|
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Perspective: Towards single shot time-resolved microscopy using short wavelength table-top light sources
|
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Collisional-Radiative Modeling for Highly-Charged Ions of Tungsten
|
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Cowan Code: 50 Years of Growing Impact on Atomic Physics
|
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Analysis of the spectra of In XII–XIV and Sn XIII–XV in the far-VUV region
|
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Physics of laser-driven tin plasma sources of EUV radiation for nanolithography
|
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Detailed investigations on radiative opacity and emissivity of tin plasmas in the extreme-ultraviolet region
|
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|
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Statistics and characteristics of xuv transition arrays from laser-produced plasmas of the elements tin through iodine
|
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|
November 1994 |
Evidence for a temperature law in non-LTE hot plasmas
|
journal
|
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Detailed atomic modeling of Sn plasmas for the EUV source
|
journal
|
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Improvements to the RADIOM non-LTE model
|
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Analysis of the fine structure of ions by optical spectroscopy in an electron-beam ion trap
|
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Radiation‐dependent ionization model for laser‐created plasmas
|
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|
November 1993 |
Onset of pseudo-thermal equilibrium within configurations and super-configurations
|
journal
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May 2006 |
Resonance lines 4p^6–4p^54d of the Kr i isoelectronic sequence
|
journal
|
January 1991 |
Radiative properties for astrophysical plasma mixtures in nonlocal thermodynamic equilibrium
|
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September 2018 |
Atomic modeling of the plasma EUV sources
|
journal
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May 2007 |
Simplified modeling of 13.5 nm unresolved transition array emission of a Sn plasma and comparison with experiment
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journal
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December 2005 |
Integral and differential cross sections for electron impact ionization
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journal
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November 1991 |
Lithography gets extreme
|
journal
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January 2010 |
Spectra of rubidium-like Pd X-Sn XIV ions
|
journal
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December 2008 |
4d–4f emission resonances in laser-produced plasmas
|
journal
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January 1981 |
Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development
|
journal
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May 2015 |
Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W
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conference
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May 2018 |
The new Los Alamos opacity code ATOMIC
|
journal
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May 2006 |
Relativistic calculations for highly correlated atomic and highly charged ionic systems
|
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March 2007 |
Laser-plasma EUV source dedicated for surface processing of polymers
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-
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 647, Issue 1
https://doi.org/10.1016/j.nima.2011.05.033
|
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CHEMEOS: A New Chemical-Picture-Based Model for Plasma Equation-of-State Calculations
|
conference
|
January 2004 |
Influence of configuration interaction on satellite lines of xenon and tin in the EUV region
|
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High conversion efficiency mass-limited Sn-based laser plasma source for extreme ultraviolet lithography
- Richardson, M.; Koay, C. -S.; Takenoshita, K.
-
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 2
https://doi.org/10.1116/1.1667511
|
journal
|
January 2004 |
Lithography for enabling advances in integrated circuits and devices
|
journal
|
August 2012 |
Analyses of the Sn IX–Sn XII spectra in the EUV region
|
journal
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May 2006 |
Interpretation of the quasicontinuum band emitted by highly ionized rare-earth elements in the 70–100 - Å range
|
journal
|
June 1987 |
Three-dimensional cellular ultrastructure resolved by X-ray microscopy
|
journal
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November 2010 |
EUV emission spectra in collisions of multiply charged Sn ions with He and Xe
|
journal
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March 2010 |
The Los Alamos suite of relativistic atomic physics codes
|
journal
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Los Alamos Opacities: Transition from LEDCOP to ATOMIC
|
conference
|
January 2004 |
Optical spectroscopy of complex open- -shell ions
|
journal
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April 2017 |
Transitions and the effects of configuration interaction in the spectra of Sn XV–Sn XVIII
|
journal
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