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U.S. Department of Energy
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Ion Beam Implantation for Nanofabrication and Modification.

Conference ·
OSTI ID:1785896

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1785896
Report Number(s):
SAND2020-5405C; 686296
Country of Publication:
United States
Language:
English

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