Assessment of nitrogen incorporation in dilute GaAsN films using isotopically enriched molecular beam epitaxy and resonant nuclear reaction analysis
- Demaree, John D.; Svensson, Stefan P.; Sarney, Wendy L.
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Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 35, Issue 2
https://doi.org/10.1116/1.4977022
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