Implantation and deposition of adherent metal-oxide ceramic coatings
- Los Alamos National Lab., NM (United States)
Firing a cathodic-arc at a pulse biased target in a low pressure background of oxygen allows very adherent coatings of metal-oxide ceramics to be deposited. Due to the high density of the metal-ion plasma and the high voltage of the pulse bias (50 kV), a relatively conformal implant can be achieved. This implanted metal layer stitches the metal-oxide coating to the surface and provides a graded interface which resists delamination. The authors present characterization of the metal-ion and carbon plasmas created by a cathodic-arc, discuss the effect of varying the relative phase of the cathodic-arc and target bias pulses, examine the conformality of ceramic and diamond-like-carbon films deposited on complicated shapes, and provide evidence of increased adherence due to the implantation step.
- OSTI ID:
- 178289
- Report Number(s):
- CONF-950612--; ISBN 0-7803-2669-5
- Country of Publication:
- United States
- Language:
- English
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