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Probing layered structure of Inconel 625 coatings prepared by magnetron sputtering

Journal Article · · Surface and Coatings Technology
 [1];  [2];  [1];  [3];  [1];  [1];  [1];  [4];  [4];  [1]
  1. Rensselaer Polytechnic Inst., Troy, NY (United States)
  2. National Inst. of Standards and Technology (NIST), Gaithersburg, MD (United States). Center for Neutron Research; Georgetown Univ., Washington, DC (United States)
  3. National Inst. of Standards and Technology (NIST), Gaithersburg, MD (United States). Center for Neutron Research
  4. National Renewable Energy Lab. (NREL), Golden, CO (United States)

Coating/substrate interface and oxide layers present in Inconel 625 film may cause significant impacts on its corrosion behavior. However, layered structure of Inconel 625 coatings remains poorly understood due to its requirement of high spatial resolution. Here we have applied X-ray reflectometry (XRR) to probe the layered structure of magnetron-sputtered Inconel 625 film with atomic spatial resolution. Our results indicate that there exists a 2 nm thick Cr-rich Inconel sublayer underneath the principal film. On top of the principal film, it is found a 2 nm thick oxide layer mainly consisting of NiO. In addition, we detected ~2 Å contamination layer on the sapphire substrate, although argon ion sputter cleaning had been applied to the substrate prior to deposition. By comparing the coatings with different deposition time, we observed that the thickness of principal Inconel 625 layer grows linearly with deposition time, with all other layers remaining constant. Our findings provide insight into the layered structures of Inconel 625 coatings with atomic-scale spatial resolution, and provide directions for future efforts that aim to improve the corrosion resistance of Inconel 625 coatings.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE Office of Energy Efficiency and Renewable Energy (EERE), Renewable Power Office. Solar Energy Technologies Office
Grant/Contract Number:
AC36-08GO28308; EE0008380
OSTI ID:
1770911
Alternate ID(s):
OSTI ID: 1777504
OSTI ID: 2282649
Report Number(s):
NREL/JA--5700-77748; MainId:30663; UUID:3d029841-e625-4d06-887f-0e5a96def226; MainAdminID:19945
Journal Information:
Surface and Coatings Technology, Journal Name: Surface and Coatings Technology Vol. 405; ISSN 0257-8972
Publisher:
ElsevierCopyright Statement
Country of Publication:
United States
Language:
English

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