A model of the gas-phase chemistry of boron nitride CVC from BCl{sub 3} and NH{sub 3}
The kinetics of gas-phase reactions occurring during the CVD of boron nitride (BN) from BCl{sub 3} and NH{sub 3} are investigated using an elementary reaction mechanism whose rate constants were obtained from theoretical predictions and literature sources. Plug-flow calculations using this mechanism predict that unimolecular decomposition of BCl{sub 3} is not significant under typical CVD conditions, but that some NH{sub 3} decomposition may occur, especially for deposition occurring at atmospheric pressure. Reaction of BCl{sub 3} with NH{sub 3} is rapid under CVD conditions and yields species containing both boron and nitrogen. One of these compounds, Cl{sub 2}BNH{sub 2}, is predicted to be a key gas-phase precursor to BN.
- Research Organization:
- Sandia Labs., Livermore, CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 176802
- Report Number(s):
- SAND--96-8450; ON: DE96003791
- Country of Publication:
- United States
- Language:
- English
Similar Records
A model of the gas-phase chemistry of boron nitride CVD from BCl{sub 3} and NH{sub 3}
A model of the gas-phase chemistry of boron nitride CVC from BCl3 and NH3
Surface-Controlled Conversion of Ammonia Borane from Boron Nitride
Book
·
Mon Dec 30 23:00:00 EST 1996
·
OSTI ID:470943
A model of the gas-phase chemistry of boron nitride CVC from BCl3 and NH3
Technical Report
·
Thu Nov 30 23:00:00 EST 1995
·
OSTI ID:382989
Surface-Controlled Conversion of Ammonia Borane from Boron Nitride
Journal Article
·
Thu Oct 22 20:00:00 EDT 2020
· Energies (Basel)
·
OSTI ID:1787286