Synthesis and Crystallization of Atomic Layer Deposition β-Eucryptite LiAlSiO4 Thin-Film Solid Electrolytes

Sheil, Ryan; Perng, Ya-Chuan; Mars, Julian; Cho, Jea; Dunn, Bruce; Toney, Michael F.; Chang, Jane P.

doi:10.1021/acsami.0c11614

Synthesis and Crystallization of Atomic Layer Deposition β-Eucryptite LiAlSiO₄ Thin-Film Solid Electrolytes

Journal Article · Mon Dec 14 00:00:00 EST 2020 · ACS Applied Materials and Interfaces

DOI:https://doi.org/10.1021/acsami.0c11614· OSTI ID:1767976

^[1]; Perng, Ya-Chuan ^[1]; ^[2]; Cho, Jea ^[1]; ^[1]; ^[2]; ^[1]

Univ. of California, Los Angeles, CA (United States)
SLAC National Accelerator Lab., Menlo Park, CA (United States)

Atomic layer deposition (ALD) was used to control the stoichiometry of thin lithium aluminosilicate films, thereby enabling crystallization into the ion-conducting β-eucryptite LiAlSiO₄ phase. Here, the rapid thermal annealed ALD film developed a well-defined epitaxial relationship to the silicon substrate: β-LiAlSiO4 ($$1\bar{21}0$$)||Si (100) and β-LiAlSiO₄ ($$10\bar{10}$$)||Si (001). The extrapolated room temperature ionic conductivity was found to be 1.2 × 10^–7 S/cm in the [$$1\bar{21}0$$] direction. Because of the unique 1-D channel along the c axis of β-LiAlSiO₄, the epitaxial thin film has the potential to facilitate ionic transport if oriented with the c axis normal to the electrode surface, making it a promising electrolyte material for three-dimensional lithium-ion microbatteries.

View Accepted Manuscript (DOE)

Research Organization:: SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-76SF00515

OSTI ID:: 1767976

Journal Information:: ACS Applied Materials and Interfaces, Journal Name: ACS Applied Materials and Interfaces Journal Issue: 51 Vol. 12; ISSN 1944-8244

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

References (54)

All-Solid-State Lithium-Ion Microbatteries: A Review of Various Three-Dimensional Concepts Oudenhoven, Jos F. M.; Baggetto, Loïc.; Notten, Peter H. L. Advanced Energy Materials, Vol. 1, Issue 1 https://doi.org/10.1002/aenm.201000002	journal	November 2010
Solid state lithium ion conductors: Design considerations by thermodynamic approach Thangadurai, V.; Weppner, W. Ionics, Vol. 8, Issue 3-4 https://doi.org/10.1007/BF02376081	journal	May 2002
β-eucryptite—a one-dimensional Li-ionic conductor Alpen, U. V.; Schönherr, E.; Schulz, Heinz Electrochimica Acta, Vol. 22, Issue 7 https://doi.org/10.1016/0013-4686(77)80038-8	journal	July 1977
Crystal structure of α-Li2.5Al0.5SiO4 Smith, R. I.; West, A. R. Journal of Solid State Chemistry, Vol. 93, Issue 2 https://doi.org/10.1016/0022-4596(91)90317-B	journal	August 1991
Ionic conductivity studies on LiAlSiO4SiO2 solid solutions of the high quartz type Nagel, W.; Böhm, H. Solid State Communications, Vol. 42, Issue 9 https://doi.org/10.1016/0038-1098(82)90806-7	journal	June 1982
Atomic subshell photoionization cross sections and asymmetry parameters: 1 ⩽ Z ⩽ 103 Yeh, J. J.; Lindau, I. Atomic Data and Nuclear Data Tables, Vol. 32, Issue 1 https://doi.org/10.1016/0092-640X(85)90016-6	journal	January 1985
Analysis of thin-film lithium batteries with cathodes of 50 nm to 4 μm thick LiCoO2 Dudney, Nancy J.; Jang, Young-Il Journal of Power Sources, Vol. 119-121 https://doi.org/10.1016/S0378-7753(03)00162-9	journal	June 2003
Mechanisms and properties of ion-transport in inorganic solid electrolytes Zhang, Bingkai; Tan, Rui; Yang, Luyi Energy Storage Materials, Vol. 10 https://doi.org/10.1016/j.ensm.2017.08.015	journal	January 2018
Raman spectroscopy quantifying the composition of stuffed β-quartz derivative phases in lithium aluminosilicate glass-ceramics Alekseeva, I.; Dymshits, O.; Ermakov, V. Journal of Non-Crystalline Solids, Vol. 354, Issue 45-46 https://doi.org/10.1016/j.jnoncrysol.2008.07.016	journal	November 2008
Addressing Interfacial Issues in Liquid-Based and Solid-State Batteries by Atomic and Molecular Layer Deposition Zhao, Yang; Zheng, Kelly; Sun, Xueliang Joule, Vol. 2, Issue 12 https://doi.org/10.1016/j.joule.2018.11.012	journal	December 2018
Co3O4 as anode material for thin film micro-batteries prepared by remote plasma atomic layer deposition Donders, M. E.; Knoops, H. C. M.; Kessels, W. M. M. Journal of Power Sources, Vol. 203 https://doi.org/10.1016/j.jpowsour.2011.12.020	journal	April 2012
Electrochemical and interfacial behavior of all solid state batteries using Li10SnP2S12 solid electrolyte Vinado, Carolina; Wang, Shanyu; He, Yang Journal of Power Sources, Vol. 396 https://doi.org/10.1016/j.jpowsour.2018.06.038	journal	August 2018
Atomic layer deposition of SnO 2 on MXene for Li-ion battery anodes Ahmed, Bilal; Anjum, Dalaver H.; Gogotsi, Yury Nano Energy, Vol. 34 https://doi.org/10.1016/j.nanoen.2017.02.043	journal	April 2017
Preparation and ionic conductivity of β-LiAlSiO4 thin film Shin-ichi, F. Solid State Ionics, Vol. 167, Issue 3-4 https://doi.org/10.1016/j.ssi.2003.12.023	journal	February 2004
Ionic conductivity of lithium alumino-silicate thin films on SiO2 glass and Al2O3 substrates Furusawa, S.; Tabuchi, H.; Tsurui, T. Solid State Ionics, Vol. 178, Issue 15-18 https://doi.org/10.1016/j.ssi.2007.05.008	journal	June 2007
Sol-gel synthesis of thin solid Li7La3Zr2O12 electrolyte films for Li-ion batteries Bitzer, Martin; Van Gestel, Tim; Uhlenbruck, Sven Thin Solid Films, Vol. 615 https://doi.org/10.1016/j.tsf.2016.07.010	journal	September 2016
Atomic Layer Deposition of the Solid Electrolyte LiPON Kozen, Alexander C.; Pearse, Alexander J.; Lin, Chuan-Fu Chemistry of Materials, Vol. 27, Issue 15 https://doi.org/10.1021/acs.chemmater.5b01654	journal	July 2015
Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries Dobbelaere, Thomas; Mattelaer, Felix; Dendooven, Jolien Chemistry of Materials, Vol. 28, Issue 10 https://doi.org/10.1021/acs.chemmater.6b00853	journal	May 2016
Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films Atosuo, Elisa; Mäntymäki, Miia; Mizohata, Kenichiro Chemistry of Materials, Vol. 29, Issue 3 https://doi.org/10.1021/acs.chemmater.6b03586	journal	January 2017
Nanoscale Solid State Batteries Enabled by Thermal Atomic Layer Deposition of a Lithium Polyphosphazene Solid State Electrolyte Pearse, Alexander J.; Schmitt, Thomas E.; Fuller, Elliot J. Chemistry of Materials, Vol. 29, Issue 8 https://doi.org/10.1021/acs.chemmater.7b00805	journal	April 2017
Atomic Layer Deposition of the Solid Electrolyte Garnet Li ₇ La ₃ Zr ₂ O ₁₂ Kazyak, Eric; Chen, Kuan-Hung; Wood, Kevin N. Chemistry of Materials, Vol. 29, Issue 8 https://doi.org/10.1021/acs.chemmater.7b00944	journal	April 2017
Low-Temperature Atomic Layer Deposition of Low-Resistivity Copper Thin Films Using Cu(dmap) ₂ and Tertiary Butyl Hydrazine Väyrynen, Katja; Mizohata, Kenichiro; Räisänen, Jyrki Chemistry of Materials, Vol. 29, Issue 15 https://doi.org/10.1021/acs.chemmater.7b02098	journal	July 2017
Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries Stewart, David M.; Pearse, Alexander J.; Kim, Nam S. Chemistry of Materials, Vol. 30, Issue 8 https://doi.org/10.1021/acs.chemmater.7b04666	journal	March 2018
Atomic Layer Deposition of Aluminum Metal Films Using a Thermally Stable Aluminum Hydride Reducing Agent Blakeney, Kyle J.; Winter, Charles H. Chemistry of Materials, Vol. 30, Issue 6 https://doi.org/10.1021/acs.chemmater.8b00445	journal	March 2018
Elucidating the Surface Reaction Mechanisms During Atomic Layer Deposition of Li _x Al _y Si _z O by in Situ Fourier Transform Infrared Spectroscopy Cho, Jea; Kim, Taeseung; Seegmiller, Trevor The Journal of Physical Chemistry C, Vol. 120, Issue 22 https://doi.org/10.1021/acs.jpcc.5b09212	journal	May 2016
Amorphous and Crystalline Vanadium Oxides as High-Energy and High-Power Cathodes for Three-Dimensional Thin-Film Lithium Ion Batteries Mattelaer, Felix; Geryl, Kobe; Rampelberg, Geert ACS Applied Materials & Interfaces, Vol. 9, Issue 15 https://doi.org/10.1021/acsami.6b16473	journal	April 2017
Atomic Layer Deposited Lithium Silicates as Solid-State Electrolytes for All-Solid-State Batteries Wang, Biqiong; Liu, Jian; Norouzi Banis, Mohammad ACS Applied Materials & Interfaces, Vol. 9, Issue 37 https://doi.org/10.1021/acsami.7b07113	journal	March 2017
Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry Pearse, Alexander; Schmitt, Thomas; Sahadeo, Emily ACS Nano, Vol. 12, Issue 5 https://doi.org/10.1021/acsnano.7b08751	journal	April 2018
Atomic Layer Deposition of Platinum Thin Films Aaltonen, Titta; Ritala, Mikko; Sajavaara, Timo Chemistry of Materials, Vol. 15, Issue 9, p. 1924-1928 https://doi.org/10.1021/cm021333t	journal	May 2003
Atomic Layer Deposition of Ruthenium Using the Novel Precursor bis(2,6,6-trimethyl-cyclohexadienyl)ruthenium Gregorczyk, Keith; Henn-Lecordier, Laurent; Gatineau, Julien Chemistry of Materials, Vol. 23, Issue 10 https://doi.org/10.1021/cm2004825	journal	May 2011
Three-Dimensional Battery Architectures Long, Jeffrey W.; Dunn, Bruce; Rolison, Debra R. Chemical Reviews, Vol. 104, Issue 10, p. 4463-4492 https://doi.org/10.1021/cr020740l	journal	October 2004
Atomic Layer Deposition of Lithium Tantalate Solid-State Electrolytes Liu, Jian; Banis, Mohammad N.; Li, Xifei The Journal of Physical Chemistry C, Vol. 117, Issue 39 https://doi.org/10.1021/jp4063302	journal	September 2013
Atomic Layer Deposition of Spinel Lithium Manganese Oxide by Film-Body-Controlled Lithium Incorporation for Thin-Film Lithium-Ion Batteries Miikkulainen, Ville; Ruud, Amund; Østreng, Erik The Journal of Physical Chemistry C, Vol. 118, Issue 2 https://doi.org/10.1021/jp409399y	journal	December 2013
NMR evidence for excess non-bridging oxygen in an aluminosilicate glass Stebbins, Jonathan F.; Xu, Zhi Nature, Vol. 390, Issue 6655 https://doi.org/10.1038/36312	journal	November 1997
Atomic layer deposition of ZnO/TiO2 nanolaminates as ultra-long life anode material for lithium-ion batteries Cao, Yan-Qiang; Wang, Shan-Shan; Liu, Chang Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-48088-2	journal	August 2019
Atomic layer deposition of LixTiyOz thin films Miikkulainen, Ville; Nilsen, Ola; Laitinen, Mikko RSC Adv., Vol. 3, Issue 20 https://doi.org/10.1039/C3RA40745D	journal	January 2013
Synthesis of ion conducting Li _x Al _y Si _z O thin films by atomic layer deposition Perng, Ya-Chuan; Cho, Jea; Sun, Steven Y. J. Mater. Chem. A, Vol. 2, Issue 25 https://doi.org/10.1039/C3TA14928E	journal	January 2014
Nanoscale, conformal polysiloxane thin film electrolytes for three-dimensional battery architectures Chen, Nan; Reeja-Jayan, B.; Lau, Jonathan Materials Horizons, Vol. 2, Issue 3 https://doi.org/10.1039/C4MH00246F	journal	January 2015
Atomic layer deposition and first principles modeling of glassy Li ₃ BO ₃ –Li ₂ CO ₃ electrolytes for solid-state Li metal batteries Kazyak, Eric; Chen, Kuan-Hung; Davis, Andrew L. Journal of Materials Chemistry A, Vol. 6, Issue 40 https://doi.org/10.1039/C8TA08761J	journal	January 2018
Atomic layer deposition of lithium phosphates as solid-state electrolytes for all-solid-state microbatteries Wang, Biqiong; Liu, Jian; Sun, Qian Nanotechnology, Vol. 25, Issue 50 https://doi.org/10.1088/0957-4484/25/50/504007	journal	November 2014
Complete Identification of Alkali Sites in Ion Conducting Lithium Silicate Glasses: A Computer Study of Ion Dynamics Lammert, Heiko; Kunow, Magnus; Heuer, Andreas Physical Review Letters, Vol. 90, Issue 21 https://doi.org/10.1103/PhysRevLett.90.215901	journal	May 2003
Location of Things (LoT): A Review and Taxonomy of Sensors Localization in IoT Infrastructure Shit, Rathin Chandra; Sharma, Suraj; Puthal, Deepak IEEE Communications Surveys & Tutorials, Vol. 20, Issue 3 https://doi.org/10.1109/COMST.2018.2798591	journal	October 2018
Mechanistic study of atomic layer deposition of Al _x Si _y O thin film via in-situ FTIR spectroscopy Cho, Jea; Kim, Taeseung; Seegmiller, Trevor Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 5 https://doi.org/10.1116/1.4927318	journal	September 2015
Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia Mäntymäki, Miia; Atosuo, Elisa; Heikkilä, Mikko J. Journal of Vacuum Science & Technology A, Vol. 37, Issue 2 https://doi.org/10.1116/1.5081494	journal	March 2019
A Stable Thin-Film Lithium Electrolyte: Lithium Phosphorus Oxynitride Yu, Xiaohua; Bates, J. B.; Jellison, G. E. Journal of The Electrochemical Society, Vol. 144, Issue 2, p. 524-532 https://doi.org/10.1149/1.1837443	journal	January 1997
Atomic Layer Deposition for All-Solid-State 3D-Integrated Batteries Knoops, Harm; Donders, Merijn E.; Baggetto, Loïc ECS Transactions, Vol. 25, Issue 4 https://doi.org/10.1149/1.3205068	journal	September 2009
Atomic Layer Deposition of LiCoO ₂ Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries Donders, M. E.; Arnoldbik, W. M.; Knoops, H. C. M. Journal of The Electrochemical Society, Vol. 160, Issue 5 https://doi.org/10.1149/2.011305jes	journal	January 2013
Garnet-Type Li ₇ La ₃ Zr ₂ O ₁₂ Solid Electrolyte Thin Films Grown by CO ₂ -Laser Assisted CVD for All-Solid-State Batteries Loho, Christoph; Djenadic, Ruzica; Bruns, Michael Journal of The Electrochemical Society, Vol. 164, Issue 1 https://doi.org/10.1149/2.0201701jes	journal	November 2016
Thermal Atomic Layer Deposition of Lithium Phosphorus Oxynitride as a Thin-Film Solid Electrolyte Shibata, Satoshi Journal of The Electrochemical Society, Vol. 163, Issue 13 https://doi.org/10.1149/2.0371613jes	journal	January 2016
Amorphous Ultrathin TiO ₂ Atomic Layer Deposition Films on Carbon Nanotubes as Anodes for Lithium Ion Batteries Xie, Ming; Sun, Xiang; Zhou, Changgong Journal of The Electrochemical Society, Vol. 162, Issue 6 https://doi.org/10.1149/2.0501506jes	journal	January 2015
Plasma-Assisted ALD of LiPO(N) for Solid State Batteries Put, B.; Mees, M. J.; Hornsveld, N. Journal of The Electrochemical Society, Vol. 166, Issue 6 https://doi.org/10.1149/2.1191906jes	journal	January 2019
Three-dimensional electrodes and battery architectures Arthur, Timothy S.; Bates, Daniel J.; Cirigliano, Nicolas MRS Bulletin, Vol. 36, Issue 7 https://doi.org/10.1557/mrs.2011.156	journal	July 2011
The Structure of Lithium-Containing Silicate and Germanate Glasses Soltay, L. G.; Henderson, G. S. The Canadian Mineralogist, Vol. 43, Issue 5 https://doi.org/10.2113/gscanmin.43.5.1643	journal	October 2005
Toward 3D Solid-State Batteries via Atomic Layer Deposition Approach Liu, Jian; Zhu, Hongzheng; Shiraz, Mohammad H. A. Frontiers in Energy Research, Vol. 6 https://doi.org/10.3389/fenrg.2018.00010	journal	March 2018

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