Double-layer graphene optical modulators and methods of fabrication thereof

Dalir, Hamed; Xia, Yan; Wang, Yuan; Zhang, Xiang

Double-layer graphene optical modulators and methods of fabrication thereof

Patent · 15 September 2020

OSTI ID:1735263

Dalir, Hamed; Xia, Yan; Wang, Yuan; Zhang, Xiang

This disclosure provides systems, methods, and apparatus related to optical modulators. In one aspect, a device includes a substrate, a first electrically insulating material disposed over the substrate, a first graphene layer and a second graphene layer disposed in the first electrically insulating material and being separated by the first electrically insulating material, and a waveguide disposed on the first electrically insulating material. At least a portion of the second graphene layer overlays at least a portion of the first graphene layer. The waveguide overlays both the first graphene layer and the second graphene layer.

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC02-05CH11231

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Number(s):: 10,775,651

Application Number:: 16/104,532

OSTI ID:: 1735263

Country of Publication:: United States

Language:: English

References (9)

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A role for graphene in silicon-based semiconductor devices Kim, Kinam; Choi, Jae-Young; Kim, Taek Nature, Vol. 479, Issue 7373 https://doi.org/10.1038/nature10680	journal	November 2011
Ultrafast All-Optical Graphene Modulator Li, Wei; Chen, Bigeng; Meng, Chao Nano Letters, Vol. 14, Issue 2 https://doi.org/10.1021/nl404356t	journal	January 2014
Double-Layer Graphene Optical Modulator Liu, Ming; Yin, Xiaobo; Zhang, Xiang Nano Letters, Vol. 12, Issue 3 https://doi.org/10.1021/nl204202k	journal	February 2012
Broadband 10 Gb/s operation of graphene electro-absorption modulator on silicon: Broadband 10 Gb/s operation of graphene electro-absorption modulator on silicon Hu, Yingtao; Pantouvaki, Marianna; Van Campenhout, Joris Laser & Photonics Reviews, Vol. 10, Issue 2 https://doi.org/10.1002/lpor.201500250	journal	January 2016
Athermal Broadband Graphene Optical Modulator with 35 GHz Speed Dalir, Hamed; Xia, Yang; Wang, Yuan ACS Photonics, Vol. 3, Issue 9 https://doi.org/10.1021/acsphotonics.6b00398	journal	July 2016
A graphene-based broadband optical modulator Liu, Ming; Yin, Xiaobo; Ulin-Avila, Erick Nature, Vol. 474, Issue 7349 https://doi.org/10.1038/nature10067	journal	May 2011
Graphene electro-optic modulator with 30 GHz bandwidth Phare, Christopher T.; Daniel Lee, Yoon-Ho; Cardenas, Jaime Nature Photonics, Vol. 9, Issue 8 https://doi.org/10.1038/nphoton.2015.122	journal	July 2015
Recent Advances in Two-Dimensional Materials beyond Graphene Bhimanapati, Ganesh R.; Lin, Zhong; Meunier, Vincent ACS Nano, Vol. 9, Issue 12 https://doi.org/10.1021/acsnano.5b05556	journal	October 2015

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