SUMMiT V(TM) Five Level Surface Micromachining Technology Design Manual 3.1.
Conference
·
OSTI ID:1713032
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1713032
- Report Number(s):
- SAND2008-0659P; 519628
- Country of Publication:
- United States
- Language:
- English
Similar Records
Sacrificial Surface Micromachining and SUMMiT TM.
SAMPLES(TM) Program: Designing and Prototyping with SUMMiT V(TM) Technology.
Designing microelectromechanical systems-on-a-chip in a 5-level surface micromachine technology
Conference
·
Sun Jul 01 00:00:00 EDT 2007
·
OSTI ID:1147563
SAMPLES(TM) Program: Designing and Prototyping with SUMMiT V(TM) Technology.
Conference
·
Sun Jul 01 00:00:00 EDT 2007
·
OSTI ID:1147647
Designing microelectromechanical systems-on-a-chip in a 5-level surface micromachine technology
Conference
·
Fri May 01 00:00:00 EDT 1998
·
OSTI ID:672074