Understanding KOtBu in atomic layer deposition – in situ mechanistic studies of the KNbO3 growth process

Sønsteby, Henrik H.; Killi, Veronica K.; Storaas, Thomas A.; Choudhury, Devika; Elam, Jeffrey W.; Fjellvåg, Helmer; Nilsen, Ola

doi:10.1039/d0dt02324h

Understanding KOtBu in atomic layer deposition – in situ mechanistic studies of the KNbO3 growth process

Journal Article · Tue Dec 31 23:00:00 EST 2019 · Dalton Transactions

DOI:https://doi.org/10.1039/d0dt02324h· OSTI ID:1705083

^[1]; Killi, Veronica K. ^[2]; Storaas, Thomas A. ^[2]; Choudhury, Devika ^[3]; ^[4]; Fjellvåg, Helmer ^[2]; ^[2]

Univ. of Oslo (Norway); Argonne National Lab. (ANL), Argonne, IL (United States)
Univ. of Oslo (Norway)
Argonne National Lab. (ANL), Argonne, IL (United States)
Argonne National Lab. (ANL), Argonne, IL (United States); Energy Frontier Research Centers (EFRC) (United States). Advanced Materials for Energy-Water Systems (AMEWS)

Functional coatings based on alkali metals have become increasingly attractive in the current shift towards sustainable technologies. While lithium-based compounds have a natural impact on batteries, other alkali metal compounds are important as replacements for toxic materials in a range of electronic devices. This is especially true for potassium, being a major component in e.g. K_xNa_1-xNbO₃ (KNN) and KTa_xNb_1-xO₃ (KTN), with hope to replace Pb(Zr_xTi_1-x)O₃ (PZT) in piezo-/ferroelectric and electrooptic devices. ALD facilitates functional conformal coatings at deposition temperatures far below what is reported using other techniques and with excellent compositional control. The ALD growth of potassium-containing films using KO^tBu has, however, been unpredictable. Untraditional response to the pulse composition and precursor dose, severe reproducibility issues, and very high growth per cycle are some of the puzzling features of these processes. In this article, we shed light on the growth behavior of KO^tBu in ALD by in situ quartz crystal microbalance and Fourier transform infrared spectroscopy studies. We study the precursor's behavior in the technologically interesting KNbO₃-process, showing how the potassium precursor strongly affects the growth of other cation precursors. We show that the strong hygroscopic nature of the intermediary potassium species has far-reaching implications throughout the growth. This helps not only to enhance the understanding of alkali metal containing compounds’ growth in ALD, but also to provide the means to control the growth of novel sustainable technological materials.

View Accepted Manuscript (DOE)

Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); Research Council of Norway

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1705083

Alternate ID(s):: OSTI ID: 1650407

Journal Information:: Dalton Transactions, Journal Name: Dalton Transactions Journal Issue: 38 Vol. 49; ISSN 1477-9226

Publisher:: Royal Society of ChemistryCopyright Statement

Country of Publication:: United States

Language:: English

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