Highly sensitive MEMS frequency modulated accelerometer with small footprint

Esteves Moreira, Eurico; Kuhlmann, Burkhard; Serra Alves, Filipe; Alves Dias, Rosana; Cabral, Jorge; Gaspar, João; Rocha, Luis Alexandre

doi:10.1016/j.sna.2020.112005

Title: Highly sensitive MEMS frequency modulated accelerometer with small footprint

Journal Article · Mon Jun 01 00:00:00 EDT 2020 · Sensors and Actuators. A, Physical

DOI:https://doi.org/10.1016/j.sna.2020.112005· OSTI ID:1702242

Esteves Moreira, Eurico; Kuhlmann, Burkhard; Serra Alves, Filipe; Alves Dias, Rosana; Cabral, Jorge; Gaspar, João; Rocha, Luis Alexandre

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Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE), Transportation Office. Fuel Cell Technologies Office

Grant/Contract Number:: UID/EEA/04436/2019

OSTI ID:: 1702242

Journal Information:: Sensors and Actuators. A, Physical, Journal Name: Sensors and Actuators. A, Physical Vol. 307 Journal Issue: C; ISSN 0924-4247

Publisher:: ElsevierCopyright Statement

Country of Publication:: Switzerland

Language:: English

References (24)

Toward Sensitivity Enhancement of MEMS Accelerometers Using Mechanical Amplification Mechanism Ya'akobovitz, Assaf; Krylov, Slava IEEE Sensors Journal, Vol. 10, Issue 8 https://doi.org/10.1109/JSEN.2009.2039751	journal	August 2010
Nonlinear dynamics under varying temperature conditions of the resonating beams of a differential resonant accelerometer Zhang, Jing; Wang, Yagang; Zega, Valentina Journal of Micromechanics and Microengineering, Vol. 28, Issue 7 https://doi.org/10.1088/1361-6439/aab7c6	journal	April 2018
A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘ Wang, Shudong; Wei, Xueyong; Weng, Yinsheng Sensors, Vol. 18, Issue 2 https://doi.org/10.3390/s18020346	journal	January 2018
Wafer level vacuum encapsulated tri-axial accelerometer with low cross-axis sensitivity in a commercial MEMS Process Merdassi, Adel; Kezzo, Mohamed Nizar; Xereas, George Sensors and Actuators A: Physical, Vol. 236 https://doi.org/10.1016/j.sna.2015.10.014	journal	December 2015
A 3-D Micromechanical Multi-Loop Magnetometer Driven Off-Resonance by an On-Chip Resonator Laghi, Giacomo; Marra, Cristiano R.; Minotti, Paolo Journal of Microelectromechanical Systems, Vol. 25, Issue 4 https://doi.org/10.1109/JMEMS.2016.2563180	journal	August 2016
Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation Lima, Vasco; Cabral, Jorge; Kuhlmann, Burkhard Proceedings, Vol. 2, Issue 13 https://doi.org/10.3390/proceedings2131029	journal	January 2018
A Closed-Loop $\Sigma\Delta$ Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/$ \surd$Hz Input Noise Density Xu, Honglin; Liu, Xiaowei; Yin, Liang IEEE Journal of Solid-State Circuits, Vol. 50, Issue 9 https://doi.org/10.1109/JSSC.2015.2428278	journal	September 2015
An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators Zhang, Hemin; Li, Boyang; Yuan, Weizheng Journal of Microelectromechanical Systems, Vol. 25, Issue 2 https://doi.org/10.1109/JMEMS.2015.2514092	journal	April 2016
Compact biaxial micromachined resonant accelerometer Caspani, Alessandro; Comi, Claudia; Corigliano, Alberto Journal of Micromechanics and Microengineering, Vol. 23, Issue 10 https://doi.org/10.1088/0960-1317/23/10/105012	journal	September 2013
A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit Comi, Claudia; Corigliano, Alberto; Langfelder, Giacomo Journal of Microelectromechanical Systems, Vol. 19, Issue 5 https://doi.org/10.1109/JMEMS.2010.2067437	journal	October 2010
A Differential Resonant Micro Accelerometer for Out-of-plane Measurements Caspani, Alessandro; Comi, Claudia; Corigliano, Alberto Procedia Engineering, Vol. 87 https://doi.org/10.1016/j.proeng.2014.11.569	journal	January 2014
The First Frequency-Modulated (FM) Pitch Gyroscope Zega, Valentina; Minotti, Paolo; Mussi, Giorgio Proceedings, Vol. 1, Issue 4 https://doi.org/10.3390/proceedings1040393	journal	January 2017
Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator Moreira, Eurico Esteves; Gaspar, João; Rocha, Luis Alexandre Proceedings, Vol. 2, Issue 13 https://doi.org/10.3390/proceedings2131028	journal	January 2018
An axial strain modulated double-ended tuning fork electrometer Lee, Joshua E. -Y.; Bahreyni, Behraad; Seshia, Ashwin A. Sensors and Actuators A: Physical, Vol. 148, Issue 2 https://doi.org/10.1016/j.sna.2008.09.010	journal	December 2008
A vacuum packaged surface micromachined resonant accelerometer Seshia, A. A.; Palaniapan, M.; Roessig, T. A. Journal of Microelectromechanical Systems, Vol. 11, Issue 6 https://doi.org/10.1109/JMEMS.2002.805207	journal	December 2002
Analytical modeling and FEM Simulations of single-stage microleverage mechanism Su, Susan Xiao-Ping; Yang, Henry S. International Journal of Mechanical Sciences, Vol. 44, Issue 11 https://doi.org/10.1016/S0020-7403(02)00162-5	journal	November 2002
A MEMS piezoelectric in-plane resonant accelerometer based on aluminum nitride with two-stage microleverage mechanism Wang, Yixiang; Ding, Hong; Le, Xianhao Sensors and Actuators A: Physical, Vol. 254 https://doi.org/10.1016/j.sna.2016.12.019	journal	February 2017
Resonant Accelerometer based on Double-Ended Tuning Fork and a Force Amplification Mechanism Moreira, Eurico Esteves; Kuhlmann, Burkhard; Gaspar, João Proceedings, Vol. 2, Issue 13 https://doi.org/10.3390/proceedings2131030	journal	January 2018
Characterization of a Mechanical Motion Amplifier Applied to a MEMS Accelerometer Zeimpekis, Ioannis; Sari, Ibrahim; Kraft, Michael Journal of Microelectromechanical Systems, Vol. 21, Issue 5 https://doi.org/10.1109/JMEMS.2012.2196491	journal	October 2012
A Small and High Sensitivity Resonant Accelerometer Pinto, D.; Mercier, D.; Kharrat, C. Procedia Chemistry, Vol. 1, Issue 1 https://doi.org/10.1016/j.proche.2009.07.134	journal	September 2009
A MEMS resonant accelerometer with sensitivity enhancement and adjustment mechanisms Ding, Hong; Wang, Wen; Ju, Bing-Feng Journal of Micromechanics and Microengineering, Vol. 27, Issue 11 https://doi.org/10.1088/1361-6439/aa8d99	journal	October 2017
A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology Su, S. X. P.; Yang, H. S.; Agogino, A. M. IEEE Sensors Journal, Vol. 5, Issue 6 https://doi.org/10.1109/JSEN.2005.857876	journal	December 2005
Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers Yin, Yonggang; Fang, Zhengxiang; Liu, Yunfeng Sensors, Vol. 19, Issue 7 https://doi.org/10.3390/s19071544	journal	March 2019
Epitaxially encapsulated resonant accelerometer with an on-chip micro-oven Shin, Dongsuk D.; Chen, Yunhan; Flader, Ian B. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) https://doi.org/10.1109/TRANSDUCERS.2017.7994119	conference	June 2017

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