Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films

Hoogeboom-Pot, Kathleen M.; Turgut, Emrah; Hernandez-Charpak, Jorge N.; Shaw, Justin M.; Kapteyn, Henry C.; Murnane, Margaret M.; Nardi, Damiano

doi:10.1021/acs.nanolett.6b00606

Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films

Journal Article · Fri Jun 10 00:00:00 EDT 2016 · Nano Letters

DOI:https://doi.org/10.1021/acs.nanolett.6b00606· OSTI ID:1682251

Hoogeboom-Pot, Kathleen M. ^[1]; Turgut, Emrah ^[2]; Hernandez-Charpak, Jorge N. ^[2]; Shaw, Justin M. ^[3]; Kapteyn, Henry C. ^[2]; Murnane, Margaret M. ^[2]; Nardi, Damiano ^[2]

Univ. of Colorado, Boulder, CO (United States); JILA/University of Colorado Boulder
Univ. of Colorado, Boulder, CO (United States)
NIST, Boulder, CO (United States)

We use short wavelength extreme ultraviolet light to independently measure the mechanical properties of disparate layers within a bilayer film for the first time, with singlemonolayer sensitivity. We show that in Ni/Ta nanostructured systems, while their density ratio is not meaningfully changed from that expected in bulk, their elastic properties are significantly modified, where nickel softens while tantalum stiffens, relative to their bulk counterparts. In particular, the presence or absence of the Ta capping layer influences the mechanical properties of the Ni film. This non-destructive nano-mechanical measurement technique represents the first approach to date able to distinguish the properties of composite materials well below 100 nm in thickness. As a result, this capability is critical for understanding and optimizing the strength, flexibility and reliability of materials in a host of nanostructured electronic, photovoltaic and thermoelectric devices.

View Accepted Manuscript (DOE)

Research Organization:: Univ. of Colorado, Boulder, CO (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0002002

OSTI ID:: 1682251

Journal Information:: Nano Letters, Journal Name: Nano Letters Journal Issue: 8 Vol. 16; ISSN 1530-6984

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films

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Cited By (5)

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