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Title: Transition from electron accumulation to depletion at $$β$$-Ga2O3 surfaces: The role of hydrogen and the charge neutrality level

Journal Article · · APL Materials
DOI:https://doi.org/10.1063/1.5054091· OSTI ID:1668503

The surface electronic properties of bulk-grown $$β$$-Ga2O3 ($$\overline{2}01$$) single crystals are investigated. The band gap is found using optical transmission to be 4.68 eV. High-resolution x-ray photoemission coupled with hybrid density functional theory calculation of the valence band density of states provides insights into the surface band bending. Importantly, the standard linear extrapolation method for determining the surface valence band maximum (VBM) binding energy is found to underestimate the separation from the Fermi level by ~0.5 eV. According to our interpretation, most reports of surface electron depletion and upward band bending based on photoemission spectroscopy actually provide evidence of surface electron accumulation. For uncleaned surfaces, the surface VBM to Fermi level separation is found to be 4.95 ± 0.10 eV, corresponding to downward band bending of ~0.24 eV and an electron accumulation layer with a sheet density of ~5 × 1012 cm–2. Uncleaned surfaces possess hydrogen termination which acts as surface donors, creating electron accumulation and downward band bending at the surface. In situ cleaning by thermal annealing removes H from the surface, resulting in a ~0.5 eV shift of the surface VBM and formation of a surface electron depletion layer with upward band bending of ~0.26 eV due to native acceptor surface states. These results are discussed in the context of the charge neutrality level, calculated bulk interstitial hydrogen transition levels, and related previous experimental findings.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA); USDOE Office of Energy Efficiency and Renewable Energy (EERE), Energy Efficiency Office. Advanced Manufacturing Office; Engineering and Physical Sciences Resource Council (EPSRC); US Air Force Office of Scientific Research (AFOSR)
Grant/Contract Number:
AC52-07NA27344; EP/L01551X/1; EP/N015800/1; FA9550-18-1-0024
OSTI ID:
1668503
Report Number(s):
LLNL-JRNL-811560; 1018203; TRN: US2203800
Journal Information:
APL Materials, Vol. 7, Issue 2; ISSN 2166-532X
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

References (74)

Direct evidence of metallicity at ZnO ( 000 1 ¯ ) ( 1 × 1 ) surfaces from angle-resolved photoemission spectroscopy journal June 2010
Hydrogenated cation vacancies in semiconducting oxides journal August 2011
Iron and intrinsic deep level states in Ga 2 O 3 journal January 2018
Conductivity in transparent oxide semiconductors journal August 2011
Deuterium incorporation and diffusivity in plasma-exposed bulk Ga 2 O 3 journal December 2016
Surface Electron Accumulation and the Charge Neutrality Level in In 2 O 3 journal September 2008
Hybrid functionals based on a screened Coulomb potential journal May 2003
Temperature and doping concentration dependence of the energy band gap in β-Ga_2O_3 thin films grown on sapphire journal January 2017
A Comparative Study on the Electrical Properties of Vertical ( $\bar{\sf2}01$ ) and (010) $\beta$ -Ga 2 O 3 Schottky Barrier Diodes on EFG Single-Crystal Substrates journal August 2018
Band bending and surface defects in β -Ga 2 O 3 journal April 2012
Atomic Layer Deposition of an Indium Gallium Oxide Thin Film for Thin-Film Transistor Applications journal July 2017
Recent progress in Ga 2 O 3 power devices journal January 2016
Electrical conductivity of In 2 O 3 and Ga 2 O 3 after low temperature ion irradiation; implications for instrinsic defect formation and charge neutrality level journal December 2017
Polar surfaces of zinc oxide crystals journal January 1969
Band alignment of In 2 O 3 /β-Ga 2 O 3 interface determined by X-ray photoelectron spectroscopy journal July 2018
Optical properties of gallium oxide films deposited by electron-beam evaporation journal December 2003
Sol-gel prepared β-Ga2O3 thin films for ultraviolet photodetectors journal January 2007
Surface morphology and electronic structure of bulk single crystal β-Ga2O3(100) journal February 2009
A review of Ga 2 O 3 materials, processing, and devices journal March 2018
Band Alignments, Valence Bands, and Core Levels in the Tin Sulfides SnS, SnS 2 , and Sn 2 S 3 : Experiment and Theory journal May 2016
Schottky Barrier Heights and the Continuum of Gap States journal March 1984
Schottky Barrier Heights and the Continuum of Gap States journal February 1984
Structural and electronic properties of Ga 2 O 3 -Al 2 O 3 alloys journal June 2018
Microscopic Origin of Electron Accumulation in In 2 O 3 journal January 2013
Hydrogen doping in indium oxide: An ab initio study journal November 2009
Study of the Au Schottky contact formation on oxygen plasma treated n-type SnO2 (101) thin films journal February 2010
Polarity-dependent photoemission of in situ cleaved zinc oxide single crystals journal July 2012
Erratum: “Hybrid functionals based on a screened Coulomb potential” [J. Chem. Phys. 118, 8207 (2003)] journal June 2006
High-resolution X-ray luminescence extension imaging journal February 2021
Observation of quantized subband states and evidence for surface electron accumulation in CdO from angle-resolved photoemission spectroscopy journal October 2008
Valence-band density of states and surface electron accumulation in epitaxial SnO 2 films journal October 2014
Anisotropy of electrical and optical properties in β-Ga2O3 single crystals journal August 1997
A Modified Local Density Approximation. Electron Density in Inversion Layers journal September 1982
Shallow donor state of hydrogen in In 2 O 3 and SnO 2 : Implications for conductivity in transparent conducting oxides journal August 2009
Amphoteric native defects in semiconductors journal May 1989
Oxygen vacancies and donor impurities in β-Ga2O3 journal October 2010
Observation of shallow-donor muonium in Ga2O3: Evidence for hydrogen-induced conductivity journal February 2010
Electronic properties of irradiated semiconductors. A model of the fermi level pinning journal May 2003
Near valence-band electronic properties of semiconducting β Ga 2 O 3 (100) single crystals journal November 2015
Valence band offset of the ZnO/AlN heterojunction determined by x-ray photoemission spectroscopy journal November 2008
Electronic structures and doping of SnO2, CuAlO2, and CuInO2 journal December 2007
The electronic structure of β-Ga2O3 journal November 2010
Optical properties of gallium oxide thin films journal July 2002
Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set journal July 1996
Stability of the Surface Electron Accumulation Layers on the Nonpolar (101̅0) and (112̅0) Faces of ZnO journal October 2014
Accumulation layer model for Ga2O3 thin-film gas sensors based on the Volkenstein theory of catalysis journal March 1994
Behaviour of hydrogen in wide band gap oxides journal May 2014
Electronic structure of AlFeN films exhibiting crystallographic orientation change from c- to a-axis with Fe concentrations and annealing effect journal February 2020
The surface and materials science of tin oxide journal January 2005
Electron effective mass in Sn-doped monoclinic single crystal β-gallium oxide determined by mid-infrared optical Hall effect journal January 2018
Determination of the branch-point energy of InN: Chemical trends in common-cation and common-anion semiconductors journal January 2008
Band-to-band transitions, selection rules, effective mass, and excitonic contributions in monoclinic β Ga 2 O 3 journal December 2017
Group-III Sesquioxides: Growth, Physical Properties and Devices journal July 2017
Sub-band-gap absorption in Ga 2 O 3 journal October 2017
Ga2O3 thin films for high-temperature gas sensors journal April 1999
Chemical bonding, optical constants, and electrical resistivity of sputter-deposited gallium oxide thin films journal January 2014
H2-induced changes in electrical conductance of ?-Ga2O3 thin-film systems journal June 1992
Dipole analysis of the dielectric function of color dispersive materials: Application to monoclinic Ga 2 O 3 journal July 2016
Depth-profile study of the electronic structures at Ga2O3(Gd2O3) and Gd2O3–GaN interfaces by X-ray photoelectron spectroscopy journal May 2005
Unification of the electrical behavior of defects, impurities, and surface states in semiconductors: Virtual gap states in CdO journal January 2009
Inversion and accumulation layers at InN surfaces journal March 2006
Tungsten Incorporation into Gallium Oxide: Crystal Structure, Surface and Interface Chemistry, Thermal Stability, and Interdiffusion journal November 2016
Nonparabolic coupled Poisson-Schrödinger solutions for quantized electron accumulation layers: Band bending, charge profile, and subbands at InN surfaces journal March 2008
Thermal Stability of Implanted or Plasma Exposed Deuterium in Single Crystal Ga 2 O 3 journal September 2016
A novel self-consistent theory of the electronic structure of inversion layers in InSb MIS structures journal April 1986
Surface properties of annealed semiconducting β-Ga2O3 (1 0 0) single crystals for epitaxy journal September 2015
The surface band structure of β-Ga 2 O 3 journal March 2011
Phase separation in metal solutions and expanded fluid metals journal June 1981
Bulk transport measurements in ZnO: The effect of surface electron layers journal February 2010
Hydrogen impurities and native defects in CdO journal September 2011
Intrinsic Electron Accumulation at Clean InN Surfaces journal January 2004
Universal alignment of hydrogen levels in semiconductors, insulators and solutions journal June 2003
Influence of polarity and hydroxyl termination on the band bending at ZnO surfaces journal December 2013
Mechanism of Fermi-level stabilization in semiconductors journal March 1988

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