skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance

Patent ·
OSTI ID:1650947
; ; ; ; ; ; ;

An enhanced method and precision nanopositioning apparatus for implementing enhanced nanopositioning performance is provided. The nanopositioning apparatus includes a vertical linear nanopositioning flexure stage and a horizontal linear nanopositioning flexure stage. The vertical linear nanopositioning flexure stage includes a stage base, a symmetrically configured flexure linear guiding mechanism with precision motion enhancement structure, and a stage carriage. The horizontal linear nanopositioning flexure stage is mounted on the stage carriage of the vertical linear nanopositioning flexure stage, and includes a middle-bar relative position control mechanism to enhance the stiffness of a flexure linear guiding mechanism.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Number(s):
10,663,040
Application Number:
15/662,086
OSTI ID:
1650947
Resource Relation:
Patent File Date: 07/27/2017
Country of Publication:
United States
Language:
English

References (15)

Optical design for laser encoder resolution extension and angular measurement patent April 1999
Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument patent February 2008
Linear Piezoelectric Nano-Positioner patent-application December 2010
Redundantly constrained laminar structure as weak-link mechanisms patent August 2003
Compact Nanofabrication Apparatus patent-application January 2009
Redundantly constrained laminar structure as weak-link mechanisms patent January 2006
Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses patent October 2009
Transducer patent April 2012
Correction of frame loss during signal decoding patent April 2017
Compound X-ray lens having multiple aligned zone plates patent September 2013
Transfer Apparatus Having Gimbal Mechanism and Transfer Method Using the Transfer Apparatus patent-application November 2006
Optical system for high resolution spectrometer/monochromator patent October 1988
Scanning Probe Microscope and Surface Shape Measuring Method Using Same patent-application August 2013
Low profile, high load vertical rolling positioning stage patent June 1996
Mechanical design of laminar weak-link rotary mechanisms with ten-degree-level travel range and ten-nanoradian-level positioning resolution patent January 2012

Similar Records

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY