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Title: Kinematic chip to chip bonding

Abstract

The various technologies presented herein relate to integrating an IC having at least one waveguide incorporated therein with a v-groove array IC such that an optical fiber located in a v-groove is aligned relative to a waveguide in the IC maximizing optical coupling between the fiber and the waveguide. The waveguide IC and the v-groove array IC are bonded in a stacked configuration. Alignment of the waveguide IC and the array IC in the stacked configuration enables advantage to be taken of lithographic accuracy of features formed with respect to the Z-direction. Further, kinematic pins and sockets are utilized to provision accuracy in the X- and Z-directions, wherein advantage is taken of the placement accuracy and fabrication tolerance(s) which can be utilized when forming the and sockets. Accordingly, automated alignment of the waveguide IC and the array IC is enabled, facilitating accurate alignment of the respective waveguides and fibers.

Inventors:
; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1650773
Patent Number(s):
10,620,377
Application Number:
15/084,164
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 03/29/2016
Country of Publication:
United States
Language:
English

Citation Formats

Burckel, David Bruce, Bauer, Todd, Henry, Michael David, and Pomerene, Andrew T. S. Kinematic chip to chip bonding. United States: N. p., 2020. Web.
Burckel, David Bruce, Bauer, Todd, Henry, Michael David, & Pomerene, Andrew T. S. Kinematic chip to chip bonding. United States.
Burckel, David Bruce, Bauer, Todd, Henry, Michael David, and Pomerene, Andrew T. S. 2020. "Kinematic chip to chip bonding". United States. https://www.osti.gov/servlets/purl/1650773.
@article{osti_1650773,
title = {Kinematic chip to chip bonding},
author = {Burckel, David Bruce and Bauer, Todd and Henry, Michael David and Pomerene, Andrew T. S.},
abstractNote = {The various technologies presented herein relate to integrating an IC having at least one waveguide incorporated therein with a v-groove array IC such that an optical fiber located in a v-groove is aligned relative to a waveguide in the IC maximizing optical coupling between the fiber and the waveguide. The waveguide IC and the v-groove array IC are bonded in a stacked configuration. Alignment of the waveguide IC and the array IC in the stacked configuration enables advantage to be taken of lithographic accuracy of features formed with respect to the Z-direction. Further, kinematic pins and sockets are utilized to provision accuracy in the X- and Z-directions, wherein advantage is taken of the placement accuracy and fabrication tolerance(s) which can be utilized when forming the and sockets. Accordingly, automated alignment of the waveguide IC and the array IC is enabled, facilitating accurate alignment of the respective waveguides and fibers.},
doi = {},
url = {https://www.osti.gov/biblio/1650773}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {4}
}