Scanning microwave impedance microscopy of buried dopant nanostructures in silicon.
Conference
·
OSTI ID:1643535
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1643535
- Report Number(s):
- SAND2019-14595C; 682501
- Country of Publication:
- United States
- Language:
- English
Similar Records
Scanning microwave impedance microscopy of buried dopant nanostructures in silicon.
Determining the resolution of scanning microwave impedance microscopy using atomic-precision buried donor structures
Conference
·
Fri Apr 01 00:00:00 EDT 2016
·
OSTI ID:1365047
Determining the resolution of scanning microwave impedance microscopy using atomic-precision buried donor structures
Journal Article
·
Wed Nov 01 00:00:00 EDT 2017
· Applied Surface Science
·
OSTI ID:1372362