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Scanning microwave impedance microscopy of buried dopant nanostructures in silicon.

Conference ·
OSTI ID:1643535
Abstract not provided.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1643535
Report Number(s):
SAND2019-14595C; 682501
Country of Publication:
United States
Language:
English

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