skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Ablating nanoscale pores in crystalline quartz using laser-induced micro-plasmas in tri-layer structures

Journal Article · · Optical Materials Express
DOI:https://doi.org/10.1364/OME.395494· OSTI ID:1643204

We demonstrate a novel approach for achieving rapid, consistent, and controllable micro-pore fabrication in single-crystalline quartz. These micro-pores are essential for applications in biology, i.e., studying ion channels in general and mechano-sensitive channels (MSC) in particular. The fabrication process consists of direct material ablation using pulsed UV light from a 193 nm excimer laser. These pulses ablate single-crystalline quartz chips by burning a laser-induced plasma in a tri-layer structure. Controllable plasma confinement and thus pore size is achieved by sandwiching a thin layer of a selected organic solution between the quartz chip and different substrates. This solution causes the confined micro-plasma to generate special ablation conditions, to create uniformly sized and shaped nanopores.

Research Organization:
Univ. of Wisconsin, Madison, WI (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
#DE-FG02-03ER46028; FG02-03ER46028
OSTI ID:
1643204
Alternate ID(s):
OSTI ID: 1800111
Journal Information:
Optical Materials Express, Journal Name: Optical Materials Express Vol. 10 Journal Issue: 8; ISSN 2159-3930
Publisher:
Optical Society of AmericaCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 1 work
Citation information provided by
Web of Science

References (22)

Laser Induced Backside Wet Etching: Mechanisms and Fabrication of Micro-Optical Elements journal April 2007
Ablation enhancement by defocused irradiation assisted femtosecond laser fabrication of stainless alloy [Ablation enhancement by defocused irradiation assisted femtosecond laser fabrication of stainless alloy] journal January 2018
Effect of Laser Wavelength at IR (1064 nm) and UV (193 nm) on the Structural Formation of Palladium Nanoparticles in Deionized Water journal November 2010
Photofragmentation dynamics of acetone of 193 nm: State distributions of the CH 3 and CO fragments by time‐ and wavelength‐resolved infrared emission journal July 1986
Localized and non-contact mechanical stimulation of dorsal root ganglion sensory neurons using scanning ion conductance microscopy journal January 2007
Molecular force transduction by ion channels – diversity and unifying principles journal July 2012
Sensing pressure with ion channels journal August 2012
Mechanosensitive ion channels journal February 1990
Zn/ZnO core/shell nanoparticles synthesized by laser ablation in aqueous environment: Optical and structural characterizations journal February 2010
On interaction of 193nm excimer laser with acetone (3s Rydberg state) journal June 2005
Laser-induced plasma-assisted ablation (LIPAA): fundamental and industrial applications conference May 2006
Direct calculation of inverse-bremsstrahlung absorption in strongly coupled, nonlinearly driven laser plasmas journal April 1998
Neurosensory mechanotransduction journal January 2009
Crystals for quartz resonators journal January 1985
Study of laser-induced plasma shock waves by the probe beam deflection technique [采用光偏转法研究激光等离子体冲击波] journal January 2009
Laser drilling of nano-pores in sandwiched thin glass membranes journal January 2009
Spectroscopic and dynamic studies of the photolysis reaction of acetone by 193 nm excimer laser journal November 2004
Tank Circuit for Ultrafast Single-Particle Detection in Micropores journal August 2018
Dual-Laser-Beam-Induced Breakdown Spectroscopy of Copper Using Simultaneous Continuous Wave CO 2 and Q-Switched Nd:YAG Lasers journal April 2009
Micro torch assisted nanostructures' formation of nickel during femtosecond laser surface interactions journal June 2016
The characteristics of laser-driven shock wave investigated by time-resolved Raman spectroscopy: The characteristics of laser-driven shock wave journal March 2011
Use the force: membrane tension as an organizer of cell shape and motility journal February 2013