High aspect ratio silicon template fabrication for 100 keV X-ray phase contrast imaging.

Conference · Tue Oct 01 00:00:00 EDT 2019

OSTI ID:1642850

Finnegan, Patrick Sean; Hollowell, Andrew E; Arrington, Christian Lew; Young, Travis Ryan; Baca, Kalin; Grover, Steven M.; Menk, Lyle Alexander; Thompson, Kyle R.; Dagel, Amber Lynn

Abstract not provided.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1642850
• Report Number(s): SAND2019-12551C; 680439
• Country of Publication: United States
• Language: English