Effects of low-fluence helium plasma exposure characterized by helium ion microscopy scanning probes and in-situ ellipsometry.
Conference
·
OSTI ID:1640077
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-CA), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1640077
- Report Number(s):
- SAND2019-5471C; 675559
- Country of Publication:
- United States
- Language:
- English
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