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Effects of low-fluence helium plasma exposure characterized by helium ion microscopy scanning probes and in-situ ellipsometry.

Conference ·
OSTI ID:1640077

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-CA), Livermore, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1640077
Report Number(s):
SAND2019-5471C; 675559
Country of Publication:
United States
Language:
English