3D Hybrid Plasmonic Framework with Au Nanopillars Embedded in Nitride Multilayers Integrated on Si

Huang, Jijie; Wang, Xuejing; Li, Dongfang; Jin, Tiening; Lu, Ping; Zhang, Di; Lin, Pao‐Tai; Chen, Hou‐Tong; Narayan, Jagdish; Zhang, Xinghang; Wang, Haiyan

doi:10.1002/admi.202000493

Title: 3D Hybrid Plasmonic Framework with Au Nanopillars Embedded in Nitride Multilayers Integrated on Si

Journal Article · Tue Jun 23 00:00:00 EDT 2020 · Advanced Materials Interfaces

DOI:https://doi.org/10.1002/admi.202000493· OSTI ID:1639062

Huang, Jijie ^[1]; Wang, Xuejing ^[2]; Li, Dongfang ^[3]; Jin, Tiening ^[4]; Lu, Ping ^[5]; Zhang, Di ^[2]; Lin, Pao‐Tai ^[4]; Chen, Hou‐Tong ^[3]; Narayan, Jagdish ^[6]; Zhang, Xinghang ^[2];

^[2]

Sun Yat-sen Univ., Guangdong (China); Purdue Univ., West Lafayette, IN (United States)
Purdue Univ., West Lafayette, IN (United States)
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Texas A & M Univ., College Station, TX (United States)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
North Carolina State Univ., Raleigh, NC (United States)

Integration of nanoscale photonic and plasmonic components on Si substrates is a critical step toward Si-based integrated nanophotonic devices. Herein, a set of unique complex 3D metamaterials with intercalated nanolayered and nanopillar structures with tunable plasmonic and optical properties on Si substrates is designed. More specifically, the 3D metamaterials combine metal (Au) nanopillars and alternating metal-nitride (Au-TiN and Au-TaN) nanolayers, epitaxially grown on Si substrates. The ultrafine Au nanopillars (d ≈ 3 nm) continuously grow throughout all the nanolayers with high epitaxial quality. Novel optical properties, such as highly anisotropic optical property, high absorbance covering the entire visible spectrum regime, and hyperbolic property in the visible regime, are demonstrated. Furthermore, a waveguide based on a silicon nitride (Si₃N₄) ridge with a multilayer structure is successfully fabricated. The demonstration of 3D nanoscale metamaterial design integrated on Si opens up a new route toward tunable metamaterials nanostructure designs with versatile material selection for various optical components in Si integrated photonics.

View Accepted Manuscript (DOE)

View Accepted Manuscript (Publisher)

Cite

Export

Save

Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Los Alamos National Laboratory (LANL), Los Alamos, NM (United States). Center for Integrated Nanotechnologies (CINT)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); National Science Foundation (NSF); USDOE Office of Science (SC); USDOE Laboratory Directed Research and Development (LDRD) Program

Grant/Contract Number:: AC04-94AL85000; NA0003525; 89233218CNA000001

OSTI ID:: 1639062

Alternate ID(s):: OSTI ID: 1634850; OSTI ID: 1739958

Report Number(s):: SAND-2020-6350J; LA-UR-20-28042; 686814

Journal Information:: Advanced Materials Interfaces, Vol. 7, Issue 17; ISSN 2196-7350

Publisher:: Wiley-VCHCopyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 17 works

Citation information provided by
Web of Science

References (42)

Plasmonic Cu nanostructures in ZnO as hyperbolic metamaterial thin films Huang, J.; Wang, X.; Phuah, X. L. Materials Today Nano, Vol. 8 https://doi.org/10.1016/j.mtnano.2019.100052	journal	December 2019
Far-Field Optical Hyperlens Magnifying Sub-Diffraction-Limited Objects Liu, Z.; Lee, H.; Xiong, Y. Science, Vol. 315, Issue 5819 https://doi.org/10.1126/science.1137368	journal	March 2007
Plasmonic nanorod metamaterials for biosensing Kabashin, A. V.; Evans, P.; Pastkovsky, S. Nature Materials, Vol. 8, Issue 11 https://doi.org/10.1038/nmat2546	journal	October 2009
Reactively sputtered TiN as a diffusion barrier between Cu and Si Wang, Shi‐Qing; Raaijmakers, Ivo; Burrow, Brad J. Journal of Applied Physics, Vol. 68, Issue 10 https://doi.org/10.1063/1.347059	journal	November 1990
Temperature stability of thin film refractory plasmonic materials Wells, Matthew P.; Bower, Ryan; Kilmurray, Rebecca Optics Express, Vol. 26, Issue 12 https://doi.org/10.1364/OE.26.015726	journal	January 2018
Broad-band optical parametric gain on a silicon photonic chip Foster, Mark A.; Turner, Amy C.; Sharping, Jay E. Nature, Vol. 441, Issue 7096 https://doi.org/10.1038/nature04932	journal	June 2006
Tailorable Optical Response of Au-LiNbO ₃ Hybrid Metamaterial Thin Films for Optical Waveguide Applications Huang, Jijie; Jin, Tiening; Misra, Shikhar Advanced Optical Materials, Vol. 6, Issue 19 https://doi.org/10.1002/adom.201800510	journal	July 2018
Silicon CMOS-integrated nano-photonics for computer and data communications beyond 100G Vlasov, Yurii IEEE Communications Magazine, Vol. 50, Issue 2 https://doi.org/10.1109/MCOM.2012.6146487	journal	February 2012
Diffusion barrier property of TaN between Si and Cu Oku, Takeo; Kawakami, Eiji; Uekubo, Masaki Applied Surface Science, Vol. 99, Issue 4 https://doi.org/10.1016/0169-4332(96)00464-3	journal	August 1996
Experimental realization of three-dimensional indefinite cavities at the nanoscale with anomalous scaling laws Yang, Xiaodong; Yao, Jie; Rho, Junsuk Nature Photonics, Vol. 6, Issue 7 https://doi.org/10.1038/nphoton.2012.124	journal	June 2012
Optical Properties of Plasmonic Ultrathin TiN Films Shah, Deesha; Reddy, Harsha; Kinsey, Nathaniel Advanced Optical Materials, Vol. 5, Issue 13 https://doi.org/10.1002/adom.201700065	journal	May 2017
Broadband Purcell effect: Radiative decay engineering with metamaterials Jacob, Zubin; Smolyaninov, Igor I.; Narimanov, Evgenii E. Applied Physics Letters, Vol. 100, Issue 18 https://doi.org/10.1063/1.4710548	journal	April 2012
Enhancing spontaneous emission rates of molecules using nanopatterned multilayer hyperbolic metamaterials Lu, Dylan; Kan, Jimmy J.; Fullerton, Eric E. Nature Nanotechnology, Vol. 9, Issue 1, p. 48-53 https://doi.org/10.1038/nnano.2013.276	journal	January 2014
Metamaterial-inspired silicon nanophotonics Staude, Isabelle; Schilling, Jörg Nature Photonics, Vol. 11, Issue 5 https://doi.org/10.1038/nphoton.2017.39	journal	April 2017
Bridging the gap between optical fibers and silicon photonic integrated circuits Zaoui, Wissem Sfar; Kunze, Andreas; Vogel, Wolfgang Optics Express, Vol. 22, Issue 2 https://doi.org/10.1364/OE.22.001277	journal	January 2014
Self-assembled vertically aligned Ni nanopillars in CeO ₂ with anisotropic magnetic and transport properties for energy applications Huang, Jijie; Qi, Zhimin; Li, Leigang Nanoscale, Vol. 10, Issue 36 https://doi.org/10.1039/C8NR05532G	journal	January 2018
Optical Hyperlens: Far-field imaging beyond the diffraction limit Jacob, Zubin; Alekseyev, Leonid V.; Narimanov, Evgenii Optics Express, Vol. 14, Issue 18 https://doi.org/10.1364/OE.14.008247	journal	January 2006
Optical Nonlocalities and Additional Waves in Epsilon-Near-Zero Metamaterials Pollard, R. J.; Murphy, A.; Hendren, W. R. Physical Review Letters, Vol. 102, Issue 12 https://doi.org/10.1103/PhysRevLett.102.127405	journal	March 2009
Optical Negative Refraction in Bulk Metamaterials of Nanowires Yao, J.; Liu, Z.; Liu, Y. Science, Vol. 321, Issue 5891 https://doi.org/10.1126/science.1157566	journal	August 2008
Self-assembled Co–BaZrO ₃ nanocomposite thin films with ultra-fine vertically aligned Co nanopillars Huang, Jijie; Li, Leigang; Lu, Ping Nanoscale, Vol. 9, Issue 23 https://doi.org/10.1039/C7NR01122A	journal	January 2017
Hyperbolic metamaterials and their applications Ferrari, Lorenzo; Wu, Chihhui; Lepage, Dominic Progress in Quantum Electronics, Vol. 40 https://doi.org/10.1016/j.pquantelec.2014.10.001	journal	March 2015
Epitaxial growth of TiN films on (100) silicon substrates by laser physical vapor deposition Narayan, J.; Tiwari, P.; Chen, X. Applied Physics Letters, Vol. 61, Issue 11 https://doi.org/10.1063/1.107568	journal	September 1992
Exchange Bias Effect along Vertical Interfaces in La _0.7 Sr _0.3 MnO ₃ :NiO Vertically Aligned Nanocomposite Thin Films Integrated on Silicon Substrates Huang, Jijie; Gellatly, Adam; Kauffmann, Alexander Crystal Growth & Design, Vol. 18, Issue 8 https://doi.org/10.1021/acs.cgd.8b00366	journal	June 2018
Three-dimensional photonic metamaterials at optical frequencies Liu, Na; Guo, Hongcang; Fu, Liwei Nature Materials, Vol. 7, Issue 1 https://doi.org/10.1038/nmat2072	journal	December 2007
Planar hyperlens based on a modulated graphene monolayer Forati, Ebrahim; Hanson, George W.; Yakovlev, Alexander B. Physical Review B, Vol. 89, Issue 8 https://doi.org/10.1103/PhysRevB.89.081410	journal	February 2014
Controlling Electromagnetic Fields Pendry, J. B.; Schurig, D.; Smith, D. R. Science, Vol. 312, Issue 5781, p. 1780-1782 https://doi.org/10.1126/science.1125907	journal	June 2006
Hyperbolic and plasmonic properties of Silicon/Ag aligned nanowire arrays Prokes, S. M.; Glembocki, Orest J.; Livenere, J. E. Optics Express, Vol. 21, Issue 12 https://doi.org/10.1364/OE.21.014962	journal	January 2013
Micrometer-Scale Cubic Unit Cell 3D Metamaterial Layers Burckel, D. Bruce; Wendt, Joel R.; Ten Eyck, Gregory A. Advanced Materials, Vol. 22, Issue 44, p. 5053-5057 https://doi.org/10.1002/adma.201002429	journal	October 2010
High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks Vlasov, Yurii; Green, William M. J.; Xia, Fengnian Nature Photonics, Vol. 2, Issue 4 https://doi.org/10.1038/nphoton.2008.31	journal	March 2008
Excitation of surface plasma wave at TiN/air interface in the Kretschmann geometry Chen, N. C.; Lien, W. C.; Liu, C. R. Journal of Applied Physics, Vol. 109, Issue 4 https://doi.org/10.1063/1.3549732	journal	February 2011
Temperature-dependent optical properties of titanium nitride Briggs, Justin A.; Naik, Gururaj V.; Zhao, Yang Applied Physics Letters, Vol. 110, Issue 10 https://doi.org/10.1063/1.4977840	journal	March 2017
Plasmons in Strongly Coupled Metallic Nanostructures Halas, Naomi J.; Lal, Surbhi; Chang, Wei-Shun Chemical Reviews, Vol. 111, Issue 6 https://doi.org/10.1021/cr200061k	journal	June 2011
Nanowire metamaterials with extreme optical anisotropy Elser, Justin; Wangberg, Robyn; Podolskiy, Viktor A. Applied Physics Letters, Vol. 89, Issue 26 https://doi.org/10.1063/1.2422893	journal	December 2006
Optical interconnection networks for high-performance computing systems Biberman, Aleksandr; Bergman, Keren Reports on Progress in Physics, Vol. 75, Issue 4 https://doi.org/10.1088/0034-4885/75/4/046402	journal	March 2012
Spherical hyperlens for two-dimensional sub-diffractional imaging at visible frequencies Rho, Junsuk; Ye, Ziliang; Xiong, Yi Nature Communications, Vol. 1, Issue 1 https://doi.org/10.1038/ncomms1148	journal	December 2010
Metamaterials: a new frontier of science and technology Liu, Yongmin; Zhang, Xiang Chemical Society Reviews, Vol. 40, Issue 5 https://doi.org/10.1039/c0cs00184h	journal	January 2011
Nanoscale Artificial Plasmonic Lattice in Self-Assembled Vertically Aligned Nitride-Metal Hybrid Metamaterials Huang, Jijie; Wang, Xuejing; Hogan, Nicki L. Advanced Science, Vol. 5, Issue 7 https://doi.org/10.1002/advs.201800416	journal	April 2018
Epitaxial superlattices with titanium nitride as a plasmonic component for optical hyperbolic metamaterials Naik, G. V.; Saha, B.; Liu, J. Proceedings of the National Academy of Sciences, Vol. 111, Issue 21 https://doi.org/10.1073/pnas.1319446111	journal	May 2014
Reversing the size-dependence of surface plasmon resonances Peng, S.; McMahon, J. M.; Schatz, G. C. Proceedings of the National Academy of Sciences, Vol. 107, Issue 33 https://doi.org/10.1073/pnas.1007524107	journal	July 2010
Biosensing with plasmonic nanosensors Anker, Jeffrey N.; Hall, W. Paige; Lyandres, Olga Nature Materials, Vol. 7, Issue 6 https://doi.org/10.1038/nmat2162	journal	June 2008
Superlenses to overcome the diffraction limit Zhang, Xiang; Liu, Zhaowei Nature Materials, Vol. 7, Issue 6, p. 435-441 https://doi.org/10.1038/nmat2141	journal	June 2008
Self-Assembled Epitaxial Au–Oxide Vertically Aligned Nanocomposites for Nanoscale Metamaterials Li, Leigang; Sun, Liuyang; Gomez-Diaz, Juan Sebastian Nano Letters, Vol. 16, Issue 6 https://doi.org/10.1021/acs.nanolett.6b01575	journal	May 2016

Similar Records

Nanoscale Artificial Plasmonic Lattice in Self-Assembled Vertically Aligned Nitride-Metal Hybrid Metamaterials

Journal Article · Fri Apr 27 00:00:00 EDT 2018 · Advanced Science · OSTI ID:1639062

Huang, Jijie; Wang, Xuejing; Hogan, Nicki L.; +16 more

Design of 3D Oxide–Metal Hybrid Metamaterial for Tailorable Light–Matter Interactions in Visible and Near-Infrared Region

Journal Article · Sun Nov 08 00:00:00 EST 2020 · Advanced Optical Materials · OSTI ID:1639062

Zhang, Di; Lu, Ping; Misra, Shikhar; +9 more

Tunable Optical Properties in Self‐Assembled Oxide‐Metal Hybrid Thin Films via Au‐Phase Geometry Control: From Nanopillars to Nanodisks

Journal Article · Wed Dec 18 00:00:00 EST 2019 · Advanced Optical Materials · OSTI ID:1639062

Zhang, Di; Misra, Shikhar; Li, Leigang; +9 more

Related Subjects

36 MATERIALS SCIENCE
Au nanopillars
hyperbolic metamaterials
metal–nitride nanocomposites
multilayers
Si integration

Title: 3D Hybrid Plasmonic Framework with Au Nanopillars Embedded in Nitride Multilayers Integrated on Si

Citation Formats

References (42)

Similar Records

Related Subjects