Microwave heating power distribution in electron-cyclotron resonance processing plasmas, experiment and theory
- Naval Research Lab., Washington, DC (United States)
The authors are currently investigating the mechanisms of microwave power absorption in an ECR plasma. The microwave electric field is detected with an antenna at the end of a shielded co-ax cable, connected to a bolometer for power measurements. Initial measurements have been 1-D along the axis of the plasma chamber. Later, 3-D profiles will be made of the microwave heating power distribution. A comparison of the experimental results with the theoretical microwave absorption are presented. A ray tracing analysis of the propagating right hand wave are given, including both collisional and collisionless absorption. Mode conversion effects are studied to explain why most of the power is absorbed at the entry window, especially the L wave power.
- OSTI ID:
- 163124
- Report Number(s):
- CONF-950612--; ISBN 0-7803-2669-5
- Country of Publication:
- United States
- Language:
- English
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