Microwave discharges maintained by surface waves: Modeling and experiments
- Russian Academy of Sciences, Moscow (Russian Federation). Lebedev Physical Inst.
- Sofia Univ. (Bulgaria). Faculty of Physics
- Ruhr Univ., Bochum (Germany). Inst. of Experimental Physics 2
Three aspects of surface wave maintained discharges are studied: (1) numerical modeling of situations when local plasma resonances due to the radial density profile are possible and important; (2) first experimental indications for predictions of the modeling; (3) peculiarities of dispersive behavior due to combined influence of radial inhomogeneity and collisions. The modeling addresses argon discharges at 0.25--1.5 Torr and radii 3--15 mm at 2.45 GHz. It is based on a nonlocal kinetic approach, including a quasilinear heating mechanism. Self-consistency is achieved by simultaneous solution of ion fluid and field equations. Radial profiles of electron density and of surface wave electric fields, energies absorbed per averaged electron and resultant axial profiles are calculated. First measurements on electric field profiles in the plasma, electron energy distributions and axial density profiles consistent with theoretical expectations are presented. The dispersive behavior of the surface waves influenced by radial inhomogeneity and collisions is studied for various conditions. The role of complex solutions existing for vanishing collisions is discussed.
- OSTI ID:
- 163091
- Report Number(s):
- CONF-950612--; ISBN 0-7803-2669-5
- Country of Publication:
- United States
- Language:
- English
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