Role of consistent terminology in XPS reproducibility

Journal Article · Fri Apr 17 00:00:00 EDT 2020 · Journal of Vacuum Science and Technology A

DOI:https://doi.org/10.1116/6.0000016· OSTI ID:1630305

Baer, Donald R. ^[1]; Shard, Alexander G. ^[2]

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1. Pacific Northwest National Lab. (PNNL), Richland, WA (United States). Environmental Molecular Sciences Lab. (EMSL)
2. National Physical Lab., Teddington (United Kingdom)

The use of inconsistent and incorrect terminology in scientific publications contributes to misunderstanding, confusion, and erroneous results in the scientific literature. This issue is of particular importance in x-ray photoelectron spectroscopy (XPS) that is in widespread use for many different purposes by scientists with diverse backgrounds. A set of surface analysis terminology, approved through consensus by international experts, has been developed by International Organization for Standardization Technical Committee TC201 on Surface Chemical Analysis. To encourage wide use, the terminology is accessible at several web sites free of charge. This short overview provides examples to highlight the importance of agreed terminology in eliminating confusion between similar terms. Examples are provided of terms that are commonly misused or confused in the literature. Other examples highlight terminology that provides a common basis for comparing instrument parameters and performance. As science advances, it is important to clarify terminology for describing evolving concepts and developments important to XPS.

• Research Organization: Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
• Sponsoring Organization: USDOE; United Kingdom Department of Business, Energy and Industrial Strategy (BEIS)
• Grant/Contract Number: AC05-76RL01830
• OSTI ID: 1630305
• Report Number(s): PNNL-SA--150698
• Journal Information: Journal of Vacuum Science and Technology A, Journal Name: Journal of Vacuum Science and Technology A Journal Issue: 3 Vol. 38; ISSN 0734-2101
• Publisher: American Vacuum Society / AIP
• Country of Publication: United States
• Language: English

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