Voltage-tunable dual-layer terahertz metamaterials

Zhao, Xiaoguang; Fan, Kebin; Zhang, Jingdi; Keiser, George R.; Duan, Guangwu; Averitt, Richard D.; Zhang, Xin

doi:10.1038/micronano.2016.25

Title: Voltage-tunable dual-layer terahertz metamaterials

Journal Article · Mon Jul 04 00:00:00 EDT 2016 · Microsystems & Nanoengineering (Online)

DOI:https://doi.org/10.1038/micronano.2016.25· OSTI ID:1623784

Zhao, Xiaoguang ^[1]; Fan, Kebin ^[1]; Zhang, Jingdi ^[2]; Keiser, George R. ^[1]; Duan, Guangwu ^[1]; Averitt, Richard D. ^[2]; Zhang, Xin ^[1]

Boston Univ., MA (United States)
Boston Univ., MA (United States); Univ. of California, San Diego, CA (United States)

This paper presents the design, fabrication, and characterization of a real-time voltage-tunable terahertz metamaterial based on microelectromechanical systems and broadside-coupled split-ring resonators. In our metamaterial, the magnetic and electric interactions between the coupled resonators are modulated by a comb-drive actuator, which provides continuous lateral shifting between the coupled resonators by up to 20 μm. For these strongly coupled split-ring resonators, both a symmetric mode and an anti-symmetric mode are observed. With increasing lateral shift, the electromagnetic interactions between the split-ring resonators weaken, resulting in frequency shifting of the resonant modes. Over the entire lateral shift range, the symmetric mode blueshifts by ~60 GHz, and the anti-symmetric mode redshifts by ~50 GHz. The amplitude of the transmission at 1.03 THz is modulated by 74%; moreover, a 180° phase shift is achieved at 1.08 THz. Our tunable metamaterial device has myriad potential applications, including terahertz spatial light modulation, phase modulation, and chemical sensing. Furthermore, the scheme that we have implemented can be scaled to operate at other frequencies, thereby enabling a wide range of distinct applications.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Boston Univ., MA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)

Grant/Contract Number:: SC0002384; ECCS-1309835; FG02-09ER46643

OSTI ID:: 1623784

Journal Information:: Microsystems & Nanoengineering (Online), Vol. 2, Issue 1; ISSN 2055-7434

Publisher:: Springer NatureCopyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 72 works

Citation information provided by
Web of Science

References (42)

High speed terahertz modulation from metamaterials with embedded high electron mobility transistors Shrekenhamer, David; Rout, Saroj; Strikwerda, Andrew C. Optics Express, Vol. 19, Issue 10 https://doi.org/10.1364/OE.19.009968	journal	January 2011
Dynamic electromagnetic metamaterials Fan, Kebin; Padilla, Willie J. Materials Today, Vol. 18, Issue 1 https://doi.org/10.1016/j.mattod.2014.07.010	journal	January 2015
Electric and Magnetic Dipole Coupling in Near-Infrared Split-Ring Metamaterial Arrays Sersic, Ivana; Frimmer, Martin; Verhagen, Ewold Physical Review Letters, Vol. 103, Issue 21 https://doi.org/10.1103/PhysRevLett.103.213902	journal	November 2009
Miniature multi-contact MEMS switch for broadband terahertz modulation Unlu, Mehmet; Jarrahi, Mona Optics Express, Vol. 22, Issue 26 https://doi.org/10.1364/OE.22.032245	journal	January 2014
Terahertz compressive imaging with metamaterial spatial light modulators Watts, Claire M.; Shrekenhamer, David; Montoya, John Nature Photonics, Vol. 8, Issue 8 https://doi.org/10.1038/nphoton.2014.139	journal	June 2014
Towards Dynamic, Tunable, and Nonlinear Metamaterials via Near Field Interactions: A Review Keiser, G. R.; Fan, K.; Zhang, X. Journal of Infrared, Millimeter, and Terahertz Waves, Vol. 34, Issue 11 https://doi.org/10.1007/s10762-013-9993-3	journal	July 2013
Graphene-supported tunable near-IR metamaterials He, Xiaoyong; Zhao, Zhen-Yu; Shi, Wangzhou Optics Letters, Vol. 40, Issue 2 https://doi.org/10.1364/OL.40.000178	journal	January 2015
Micromachined tunable metamaterials: a review Liu, A. Q.; Zhu, W. M.; Tsai, D. P. Journal of Optics, Vol. 14, Issue 11 https://doi.org/10.1088/2040-8978/14/11/114009	journal	September 2012
Reconfigurable Terahertz Metamaterials Tao, Hu; Strikwerda, A. C.; Fan, K. Physical Review Letters, Vol. 103, Issue 14 https://doi.org/10.1103/PhysRevLett.103.147401	journal	October 2009
Optically Tunable Terahertz Metamaterials on Highly Flexible Substrates Fan, Kebin; Zhao, Xiaoguang; Zhang, Jingdi IEEE Transactions on Terahertz Science and Technology, Vol. 3, Issue 6 https://doi.org/10.1109/TTHZ.2013.2285619	journal	November 2013
Comparative analysis of edge- and broadside-coupled split ring resonators for metamaterial design - Theory and experiments Marques, R.; Mesa, F.; Martel, J. IEEE Transactions on Antennas and Propagation, Vol. 51, Issue 10 https://doi.org/10.1109/TAP.2003.817562	journal	October 2003
Thin-film sensing with planar terahertz metamaterials: sensitivity and limitations O'Hara, John F.; Singh, Ranjan; Brener, Igal Optics Express, Vol. 16, Issue 3 https://doi.org/10.1364/OE.16.001786	journal	January 2008
Polarization dependent state to polarization independent state change in THz metamaterials Zhu, W. M.; Liu, A. Q.; Zhang, W. Applied Physics Letters, Vol. 99, Issue 22 https://doi.org/10.1063/1.3664131	journal	November 2011
Metamaterials and Negative Refractive Index Smith, D. R.; Pendry, J. B.; Wiltshire, M. C. K. Science, Vol. 305, Issue 5685, p. 788-792 https://doi.org/10.1126/science.1096796	journal	August 2004
Switchable Magnetic Metamaterials Using Micromachining Processes Zhu, Wei Ming; Liu, Ai Qun; Zhang, Xu Ming Advanced Materials, Vol. 23, Issue 15 https://doi.org/10.1002/adma.201004341	journal	February 2011
Three-dimensional magnetic terahertz metamaterials using a multilayer electroplating technique Fan, Kebin; Strikwerda, Andrew C.; Averitt, Richard D. Journal of Micromechanics and Microengineering, Vol. 22, Issue 4 https://doi.org/10.1088/0960-1317/22/4/045011	journal	March 2012
7 GHz resolution waveguide THz spectroscopy of explosives related solids showing new features Laman, N.; Sree Harsha, S.; Grischkowsky, D. Optics Express, Vol. 16, Issue 6 https://doi.org/10.1364/OE.16.004094	journal	January 2008
Structural control of metamaterial oscillator strength and electric field enhancement at terahertz frequencies Keiser, G. R.; Seren, H. R.; Strikwerda, A. C. Applied Physics Letters, Vol. 105, Issue 8 https://doi.org/10.1063/1.4894466	journal	August 2014
Metamaterials Controlled with Light Shadrivov, Ilya V.; Kapitanova, Polina V.; Maslovski, Stanislav I. Physical Review Letters, Vol. 109, Issue 8 https://doi.org/10.1103/PhysRevLett.109.083902	journal	August 2012
Liquid Crystal Tunable Metamaterial Absorber Shrekenhamer, David; Chen, Wen-Chen; Padilla, Willie J. Physical Review Letters, Vol. 110, Issue 17 https://doi.org/10.1103/PhysRevLett.110.177403	journal	April 2013
Perfect Metamaterial Absorber Landy, N. I.; Sajuyigbe, S.; Mock, J. J. Physical Review Letters, Vol. 100, Issue 20 https://doi.org/10.1103/PhysRevLett.100.207402	journal	May 2008
Terahertz Metamaterials for Linear Polarization Conversion and Anomalous Refraction Grady, N. K.; Heyes, J. E.; Chowdhury, D. R. Science, Vol. 340, Issue 6138 https://doi.org/10.1126/science.1235399	journal	May 2013
Narrow-Line Waveguide Terahertz Time-Domain Spectroscopy of Aspirin and Aspirin Precursors Laman, N.; Harsha, S. Sree; Grischkowsky, D. Applied Spectroscopy, Vol. 62, Issue 3 https://doi.org/10.1366/000370208783759768	journal	March 2008
A real-time tunable terahertz metamaterial based on broadside-coupled split ring resonators Zhao, X.; Fan, K.; Zhang, J. TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) https://doi.org/10.1109/TRANSDUCERS.2015.7180924	conference	June 2015
Applications of Terahertz Spectroscopy in Biosystems Plusquellic, David F.; Siegrist, Karen; Heilweil, Edwin J. ChemPhysChem, Vol. 8, Issue 17 https://doi.org/10.1002/cphc.200700332	journal	December 2007
Bianisotropic Photonic Metamaterials Kriegler, Christine Eliane; Rill, Michael Stefan; Linden, Stefan IEEE Journal of Selected Topics in Quantum Electronics, Vol. 16, Issue 2 https://doi.org/10.1109/JSTQE.2009.2020809	journal	January 2010
Microelectromechanical Maltese-cross metamaterial with tunable terahertz anisotropy Zhu, W. M.; Liu, A. Q.; Bourouina, T. Nature Communications, Vol. 3, Issue 1 https://doi.org/10.1038/ncomms2285	journal	January 2012
Dynamic Manipulation of Infrared Radiation with MEMS Metamaterials Liu, Xianliang; Padilla, Willie J. Advanced Optical Materials, Vol. 1, Issue 8 https://doi.org/10.1002/adom.201300163	journal	June 2013
Microwave and terahertz wave sensing with metamaterials Tao, Hu; Kadlec, Emil A.; Strikwerda, Andrew C. Optics Express, Vol. 19, Issue 22 https://doi.org/10.1364/OE.19.021620	journal	January 2011
Metamaterial tuning by manipulation of near-field interaction Powell, David A.; Lapine, Mikhail; Gorkunov, Maxim V. Physical Review B, Vol. 82, Issue 15 https://doi.org/10.1103/PhysRevB.82.155128	journal	October 2010
Tunable multiband terahertz metamaterials using a reconfigurable electric split-ring resonator array Ma, Fusheng; Lin, Yu-Sheng; Zhang, Xinhai Light: Science & Applications, Vol. 3, Issue 5 https://doi.org/10.1038/lsa.2014.52	journal	May 2014
Experimental demonstration of frequency-agile terahertz metamaterials Chen, Hou-Tong; O'Hara, John F.; Azad, Abul K. Nature Photonics, Vol. 2, Issue 5 https://doi.org/10.1038/nphoton.2008.52	journal	April 2008
Frequency tunable terahertz metamaterials using broadside coupled split-ring resonators Ekmekci, E.; Strikwerda, A. C.; Fan, K. Physical Review B, Vol. 83, Issue 19 https://doi.org/10.1103/PhysRevB.83.193103	journal	May 2011
Tunable terahertz graphene metamaterials He, Xiaoyong Carbon, Vol. 82 https://doi.org/10.1016/j.carbon.2014.10.066	journal	February 2015
Reconfigurable Photonic Metamaterials Ou, J. Y.; Plum, E.; Jiang, L. Nano Letters, Vol. 11, Issue 5 https://doi.org/10.1021/nl200791r	journal	May 2011
Composite Medium with Simultaneously Negative Permeability and Permittivity Smith, D. R.; Padilla, Willie J.; Vier, D. C. Physical Review Letters, Vol. 84, Issue 18 https://doi.org/10.1103/PhysRevLett.84.4184	journal	May 2000
Metamaterial Electromagnetic Cloak at Microwave Frequencies Schurig, D.; Mock, J. J.; Justice, B. J. Science, Vol. 314, Issue 5801 https://doi.org/10.1126/science.1133628	journal	November 2006
Superlenses to overcome the diffraction limit Zhang, Xiang; Liu, Zhaowei Nature Materials, Vol. 7, Issue 6, p. 435-441 https://doi.org/10.1038/nmat2141	journal	June 2008
Active terahertz metamaterial devices Chen, Hou-Tong; Padilla, Willie J.; Zide, Joshua M. O. Nature, Vol. 444, Issue 7119, p. 597-600 https://doi.org/10.1038/nature05343	journal	November 2006
A Micromachined Reconfigurable Metamaterial via Reconfiguration of Asymmetric Split-Ring Resonators Fu, Yuan Hsing; Liu, Ai Qun; Zhu, Wei Ming Advanced Functional Materials, Vol. 21, Issue 18 https://doi.org/10.1002/adfm.201101087	journal	August 2011
Optically tunable metamaterial perfect absorber on highly flexible substrate Zhao, Xiaoguang; Fan, Kebin; Zhang, Jingdi Sensors and Actuators A: Physical, Vol. 231 https://doi.org/10.1016/j.sna.2015.02.040	journal	July 2015
Post-processing approach for tuning multi-layered metamaterials Liu, Liming; Chen, Wen-chen; Powell, David A. Applied Physics Letters, Vol. 105, Issue 15 https://doi.org/10.1063/1.4897949	journal	October 2014

Cited By (20)

Design of 3D broad-band and wide-angle absorber based on resistive metamaterial and magnetic absorbing material Wang, Aixia; Wang, Binke; Wang, Jiafu Journal of Physics D: Applied Physics, Vol. 53, Issue 9 https://doi.org/10.1088/1361-6463/ab5c2a	journal	December 2019
Implementing infrared metamaterial perfect absorbers using dispersive dielectric spacers Zhao, Xiaoguang; Chen, Chunxu; Li, Aobo Optics Express, Vol. 27, Issue 2 https://doi.org/10.1364/oe.27.001727	journal	January 2019
Controllable directive radiation from dipole emitter coupled to dielectric nanowire antenna with substrate-mediated tunability Salary, Mohammad M.; Forouzmand, Ali; Mosallaei, Hossein MRS Communications, Vol. 8, Issue 02 https://doi.org/10.1557/mrc.2018.46	journal	April 2018
Real-time tunable phase response and group delay in broadside coupled split-ring resonators Zhao, Xiaoguang; Zhang, Jingdi; Fan, Kebin Physical Review B, Vol. 99, Issue 24 https://doi.org/10.1103/physrevb.99.245111	journal	June 2019
Integrating microsystems with metamaterials towards metadevices Zhao, Xiaoguang; Duan, Guangwu; Li, Aobo Microsystems & Nanoengineering, Vol. 5, Issue 1 https://doi.org/10.1038/s41378-018-0042-1	journal	January 2019
Terahertz Field Confinement in Nonlinear Metamaterials and Near-Field Imaging Keiser, George; Klarskov, Pernille Photonics, Vol. 6, Issue 1 https://doi.org/10.3390/photonics6010022	journal	February 2019
Electrically Controllable Molecularization of Terahertz Meta-Atoms Jung, Hyunseung; Koo, Jaemok; Heo, Eunah Advanced Materials, Vol. 30, Issue 31 https://doi.org/10.1002/adma.201802760	journal	June 2018
Design, Fabrication, and Modulation of THz Bandpass Metamaterials Wang, Qinghua; Gao, Bingtao; Raglione, Michaella Laser & Photonics Reviews, Vol. 13, Issue 11 https://doi.org/10.1002/lpor.201900071	journal	October 2019
Deeply Subwavelength Metasurface Resonators for Terahertz Wavefront Manipulation Liu, Mingkai; Yang, Quanlong; Rifat, Ahmmed A. Advanced Optical Materials, Vol. 7, Issue 21 https://doi.org/10.1002/adom.201900736	journal	August 2019
Lattice induced strong coupling and line narrowing of split resonances in metamaterials Tan, Thomas CaiWei; Srivastava, Yogesh Kumar; Manjappa, Manukumara Applied Physics Letters, Vol. 112, Issue 20 https://doi.org/10.1063/1.5026649	journal	May 2018
Intensity Switchable and Wide-Angle Mid-Infrared Perfect Absorber with Lithography-Free Phase-Change Film of Ge2Sb2Te5 Hua, Xiaomin; Zheng, Gaige Micromachines, Vol. 10, Issue 6 https://doi.org/10.3390/mi10060374	journal	June 2019
Photo-induced high modulation depth terahertz modulator based on VO _x –Si–VO _x hybrid structure Hu, Fangrong; Wang, Hong; Li, Tong Journal of Physics D: Applied Physics, Vol. 52, Issue 17 https://doi.org/10.1088/1361-6463/ab046f	journal	February 2019
Integrating Microsystems with Metamaterials Towards Metadevices Zhao, Xiaoguang; Li, Aobo; Duan, Guangwu 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) https://doi.org/10.1109/transducers.2019.8808812	conference	June 2019
Ultrafast Terahertz Frequency and Phase Tuning by All‐Optical Molecularization of Metasurfaces Hu, Yuze; Jiang, Tian; Zhou, Junhu Advanced Optical Materials, Vol. 7, Issue 22 https://doi.org/10.1002/adom.201901050	journal	August 2019
Ultrafast Frequency Shift of Electromagnetically Induced Transparency in Terahertz Metaphotonic Devices Hu, Yuze; Jiang, Tian; Sun, Hao Laser & Photonics Reviews, Vol. 14, Issue 3 https://doi.org/10.1002/lpor.201900338	journal	February 2020
Gradual cross polarization conversion of transmitted waves in near field coupled planar terahertz metamaterials Rao, S. Jagan Mohan; Sarkar, Rakesh; Kumar, Gagan OSA Continuum, Vol. 2, Issue 3 https://doi.org/10.1364/osac.2.000603	journal	January 2019
Integrating Microsystems with Metamaterials Towards Metadevices Zhao, Xiaoguang; Li, Aobo; Duan, Guangwu 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) https://doi.org/10.1109/transducers.2019.8808452	conference	June 2019
Bidirectional reconfiguration and thermal tuning of microcantilever metamaterial device operating from 77 K to 400 K Pitchappa, Prakash; Manjappa, Manukumara; Krishnamoorthy, Harish N. S. Applied Physics Letters, Vol. 111, Issue 26 https://doi.org/10.1063/1.5006836	journal	December 2017
Terahertz metamaterial perfect absorber with continuously tunable air spacer layer Schalch, Jacob; Duan, Guangwu; Zhao, Xiaoguang Applied Physics Letters, Vol. 113, Issue 6 https://doi.org/10.1063/1.5041282	journal	August 2018
Electric megahertz metamaterials designed with deep subwavelength multilayered meander line resonators Xu, Xiaofei; Huang, Qianling; Deng, Xiao Journal of Applied Physics, Vol. 125, Issue 19 https://doi.org/10.1063/1.5088535	journal	May 2019

Similar Records

A three-dimensional all-metal terahertz metamaterial perfect absorber

Journal Article · Tue Aug 01 00:00:00 EDT 2017 · Applied Physics Letters · OSTI ID:1623784

Wu, Meng; Zhao, Xiaoguang; Zhang, Jingdi; +5 more

Nonlinear terahertz devices utilizing semiconducting plasmonic metamaterials

Journal Article · Tue Jan 26 00:00:00 EST 2016 · Light, Science & Applications · OSTI ID:1623784

Seren, Huseyin R.; Zhang, Jingdi; Keiser, George R.; +6 more

Structural tuning of nonlinear terahertz metamaterials using broadside coupled split ring resonators

Journal Article · Thu Sep 02 00:00:00 EDT 2021 · AIP Advances · OSTI ID:1623784

Keiser, George R.; Karl, Nicholas; Ul Haque, Sheikh Rubaiat; +3 more

Related Subjects

42 ENGINEERING
science & technology
instruments & instrumentation
micro-optics
optical materials and structures

Title: Voltage-tunable dual-layer terahertz metamaterials

Citation Formats

References (42)

Cited By (20)

Similar Records

Related Subjects