Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator

Rodriguez, Janna; Chandorkar, Saurabh A.; Watson, Christopher A.; Glaze, Grant M.; Ahn, C. H.; Ng, Eldwin J.; Yang, Yushi; Kenny, Thomas W.

doi:10.1038/s41598-019-38847-6

Title: Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator

Journal Article · Tue Feb 19 00:00:00 EST 2019 · Scientific Reports

DOI:https://doi.org/10.1038/s41598-019-38847-6· OSTI ID:1619492

Rodriguez, Janna; Chandorkar, Saurabh A.; Watson, Christopher A.; Glaze, Grant M.; Ahn, C. H.; Ng, Eldwin J.; Yang, Yushi; Kenny, Thomas W.

Abstract Silicon Microelectromechanical Systems (MEMS) resonators have broad commercial applications for timing and inertial sensing. However, the performance of MEMS resonators is constrained by dissipation mechanisms, some of which are easily detected and well-understood, but some of which have never been directly observed. In this work, we present measurements of the quality factor, Q , for a family of single crystal silicon Lamé-mode resonators as a function of temperature, from 80–300 K . By comparing these Q measurements on resonators with variations in design, dimensions, and anchors, we have been able to show that gas damping, thermoelastic dissipation, and anchor damping are not significant dissipation mechanisms for these resonators. The measured f · Q product for these devices approaches 2 × 10 ¹³ , which is consistent with the expected range for Akhiezer damping, and the dependence of Q on temperature and geometry is consistent with expectations for Akhiezer damping. These results thus provide the first clear, direct detection of Akhiezer dissipation in a MEMS resonator, which is widely considered to be the ultimate limit to Q in silicon MEMS devices.

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Research Organization:: SLAC National Accelerator Lab. (SLAC), Menlo Park, CA (United States)

Sponsoring Organization:: USDOE; USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division

Grant/Contract Number:: AC02-76SF00515; N66001-16-1-4023

OSTI ID:: 1619492

Alternate ID(s):: OSTI ID: 1506233

Journal Information:: Scientific Reports, Journal Name: Scientific Reports Vol. 9 Journal Issue: 1; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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Cited by: 36 works

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