Influence of heavier impurity deposition on surface morphology development and sputtering behavior explored in multiple linear plasma devices

Nishijima, D.; Kreter, A.; Baldwin, M. J.; Borodin, D.; Eksaeva, A.; Hwangbo, D.; Kajita, S.; Miyamoto, M.; Ohno, N.; Patino, M.; Pospieszczyk, A.; Rasinski, M.; Schlummer, T.; Terra, A.; Doerner, R. P.

doi:10.1016/j.nme.2018.12.008

Influence of heavier impurity deposition on surface morphology development and sputtering behavior explored in multiple linear plasma devices

Journal Article · Tue Dec 11 00:00:00 EST 2018 · Nuclear Materials and Energy

DOI:https://doi.org/10.1016/j.nme.2018.12.008· OSTI ID:1609931

Nishijima, D. ^[1]; ^[2]; Baldwin, M. J. ^[3]; ^[2]; Eksaeva, A. ^[4]; Hwangbo, D. ^[5]; ^[5]; Miyamoto, M. ^[6]; Ohno, N. ^[5]; Patino, M. ^[3]; Pospieszczyk, A. ^[2]; Rasinski, M. ^[2]; Schlummer, T. ^[2]; Terra, A. ^[2]; Doerner, R. P. ^[3]

Univ. of California, San Diego, CA (United States); DOE/OSTI
Forschungszentrum Juelich GmbH (Germany)
Univ. of California, San Diego, CA (United States)
Forschungszentrum Juelich GmbH (Germany); National Research Nuclear Univ. MEPhI, Moscow (Russia)
Nagoya Univ. (Japan)
Shimane Univ., Matsue (Japan)

Surface morphology development and sputtering behavior of Cr, as a test material, have been explored under He plasma exposure at a low incident ion energy of ~80 eV in multiple linear plasma devices: PISCES-A, PSI-2, and NAGDIS-II. From comparison of the experiments in these devices, deposition of a small amount of heavier impurities (Mo in NAGDIS-II and Ta in PISCES-A) onto Cr is found to result in the formation of cone structures on the Cr surface due to preferential sputtering, resulting in a significant reduction (up to ~10 times) in the sputtering yield of Cr due to line-of-sight redeposition onto the neighboring cones. The heavier impurities are thought to originate from a sample holding cap/cover, which can be sputtered by a trace amount of intrinsic impurities (C, O, etc) as well as by Cr ionized in the plasma. It can be concluded from the Cr experiments, as well as additional Be data collected in PISCES-B, that heavier impurity deposition plays a major role in the cone structure formation, while other mechanisms (e.g. surface irregularity and oxide) also exist.

View Accepted Manuscript (DOE)

Research Organization:: Univ. of California, San Diego, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: FG02-07ER54912

OSTI ID:: 1609931

Journal Information:: Nuclear Materials and Energy, Journal Name: Nuclear Materials and Energy Journal Issue: C Vol. 18; ISSN 2352-1791

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

References (15)

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Nanoscale modification of silicon and germanium surfaces exposed to low-energy helium plasma Thompson, Matt; Magyar, Luke; Corr, Cormac Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-46541-w	journal	July 2019
Observation of increased nanostructure cone growth on Cr due to grazing-incidence Ta seed atom deposition in a He plasma Hollmann, E. M.; Nishijima, D.; Patino, M. I. Journal of Applied Physics, Vol. 126, Issue 7 https://doi.org/10.1063/1.5110298	journal	August 2019

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