Adapting the Electron Beam from SEM as a Quantitative Heating Source for Nanoscale Thermal Metrology

Yuan, Pengyu; Wu, Jason Y.; Ogletree, D. Frank; Urban, Jeffrey J.; Dames, Chris; Ma, Yanbao

doi:10.1021/acs.nanolett.9b04940

Adapting the Electron Beam from SEM as a Quantitative Heating Source for Nanoscale Thermal Metrology

Journal Article · Wed Apr 08 00:00:00 EDT 2020 · Nano Letters

DOI:https://doi.org/10.1021/acs.nanolett.9b04940· OSTI ID:1609122

Yuan, Pengyu ^[1]; Wu, Jason Y. ^[2]; Ogletree, D. Frank ^[3]; ^[3]; Dames, Chris ^[2]; ^[4]

Univ. of California, Berkeley, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). The Molecular Foundry
Univ. of California, Berkeley, CA (United States)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). The Molecular Foundry
Univ. of California, Merced, CA (United States)

The electron beam (e-beam) in the scanning electron microscopy (SEM) provides an appealing mobile heating source for thermal metrology with spatial resolution of ~1 nm, but the lack of systematic quantification of the e-beam heating power limits such application development. Here, we systemically study e-beam heating in LPCVD silicon nitride (SiN_x) thin-films with thickness ranging from 200 to 500 nm from both experiments and complementary Monte Carlo simulations using the CASINO software package. There is good agreement about the thickness-dependent e-beam energy absorption of thin-film between modeling predictions and experiments. Using the absorption results, we then demonstrate adapting the e-beam as a quantitative heating source by measuring the thickness-dependent thermal conductivity of SiN_x thin-films, with the results validated to within 7% by a separate Joule heating experiment. The results described here will open a new avenue for using SEM e-beams as a mobile heating source for advanced nanoscale thermal metrology development.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: Air Force Office of Scientific Research (AFOSR); National Science Foundation (NSF); USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1609122

Journal Information:: Nano Letters, Journal Name: Nano Letters Journal Issue: 5 Vol. 20; ISSN 1530-6984

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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42 ENGINEERING
CASINO
e-beam
quantitative analysis
silicon nitride
thermal conductivity

Adapting the Electron Beam from SEM as a Quantitative Heating Source for Nanoscale Thermal Metrology

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