Atom-by-atom fabrication with electron beams

Dyck, Ondrej; Ziatdinov, Maxim; Lingerfelt, David; Unocic, Raymond R.; Hudak, Bethany M.; Lupini, Andrew R.; Jesse, Stephen; Kalinin, Sergei V.

doi:10.1038/s41578-019-0118-z

Atom-by-atom fabrication with electron beams

Journal Article · Fri Jun 07 00:00:00 EDT 2019 · Nature Reviews. Materials

DOI:https://doi.org/10.1038/s41578-019-0118-z· OSTI ID:1607230

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Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Assembling matter atom-by-atom into functional devices is the ultimate goal of nanotechnology. The possibility of achieving this goal is intrinsically dependent on the ability to visualize matter at the atomic level, induce and control atomic-scale motion, facilitate and direct chemical reactions, and coordinate and guide fabrication processes towards desired structures atom-by-atom. In this Perspective, we summarize recent progress in chemical transformations, material alterations and atomic dynamics studies enabled by the converged, atomic-sized electron beam of an aberration-corrected scanning transmission electron microscope. We discuss how such top-down observations have led to the concept of controllable, beam-induced processes and then of bottom-up, atom-by-atom assembly via electron-beam control. Finally, the progress in this field, from electron-beam-induced material transformations to atomically precise doping and multi-atom assembly, is reviewed, as are the associated engineering, theoretical and big-data challenges.

View Accepted Manuscript (DOE)

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1607230

Journal Information:: Nature Reviews. Materials, Journal Name: Nature Reviews. Materials Journal Issue: 7 Vol. 4; ISSN 2058-8437

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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