Flexure-based, tip-tilt-piston actuation micro-array

Hopkins, Jonathan; Panas, Robert Matthew

Flexure-based, tip-tilt-piston actuation micro-array

Patent · Tue Oct 15 00:00:00 EDT 2019

OSTI ID:1600158

Hopkins, Jonathan; Panas, Robert Matthew

A flexure-based micro-array having a plurality of micro-assemblies, each comprising: an object; and at least three electrostatic actuation modules for tipping, tilting, and/or piston-actuating the object, each actuation module comprising: a base with first and second electrodes electrically isolated from each other; an electrically conductive lever arm; a first flexure bearing suspending the lever arm adjacent the first and second electrodes so that electrical activation of at least one of the first and second electrodes produces an electrostatic moment of force on the lever arm to resiliently bias the first flexure bearing and pivot the lever arm about a fulcrum; and a second flexure bearing connecting the lever arm to the object at a connection location that is different from other connection locations of the other actuation modules so that pivoting the lever arm about the fulcrum induces the second flexure bearing to pivot the object about an object pivot axis defined between two of the other connection locations while the second flexure bearing decouples the lever arm from object displacements induced by two of the other actuation modules connected to the two other connection locations defining the object pivot axis, wherein the plurality of micro-assemblies are arranged with the objects juxtaposed in a substantially 2D array.

Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC52-07NA27344

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

Patent Number(s):: 10,444,492

Application Number:: 14/218,970

OSTI ID:: 1600158

Country of Publication:: United States

Language:: English

References (9)

Torsional Micromirrors with Lateral Actuators Milanović, Veljko; Last, Matthew; Pister, Kristofer S. J. Transducers ’01 Eurosensors XV, p. 1270-1273 https://doi.org/10.1007/978-3-642-59497-7_299	book	December 2000
Multilevel Beam SOI-MEMS Fabrication and Applications Milanovic, V. Journal of Microelectromechanical Systems, Vol. 13, Issue 1 https://doi.org/10.1109/JMEMS.2003.823226	journal	February 2004
Vertical Combdrive Based 2-D Gimbaled Micromirrors With Large Static Rotation by Backside Island Isolation Kwon, S.; Milanovic, V.; Lee, L. P. IEEE Journal of Selected Topics in Quantum Electronics, Vol. 10, Issue 3 https://doi.org/10.1109/JSTQE.2004.828493	journal	May 2004
Gimbal-Less Monolithic Silicon Actuators for Tip–Tilt–Piston Micromirror Applications Milanovic, V.; Matus, G. A.; McCormick, D. T. IEEE Journal of Selected Topics in Quantum Electronics, Vol. 10, Issue 3 https://doi.org/10.1109/JSTQE.2004.829205	journal	May 2004
Laterally actuated torsional micromirrors for large static deflection Milanovic, V.; Last, M.; Pister, K. S. J. IEEE Photonics Technology Letters, Vol. 15, Issue 2 https://doi.org/10.1109/LPT.2002.806085	journal	February 2003
High Aspect Ratio Micromirrors With Large Static Rotation and Piston Actuation Milanovic, V.; Kwon, S.; Lee, L. P. IEEE Photonics Technology Letters, Vol. 16, Issue 8 https://doi.org/10.1109/LPT.2004.828351	journal	August 2004
Linearized Gimbal-less Two-Axis MEMS Mirrors Milanovic, Veljko Optical Fiber Communication Conference and National Fiber Optic Engineers Conference https://doi.org/10.1364/NFOEC.2009.JThA19	conference	January 2009
Vertical Microlens Scanner for 3D Imaging Kwon, S.; Milanovic, V.; Lee, L. P. 2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest https://doi.org/10.31438/trf.hh2002.57	conference	June 2002
Tip-Tilt-Piston Actuators for high Fill-Factor Micromirror Arrays Milanovic, V.; Matus, G. A.; McCormick, D. T. 2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest https://doi.org/10.31438/trf.hh2004.62	conference	June 2004

Similar Records

Engine valve operating system for an internal combustion engine

Patent · Mon Feb 03 23:00:00 EST 1986 · OSTI ID:5959599

Lever-type two-cycle internal combustion engine

Patent · Tue Jun 25 00:00:00 EDT 1991 · OSTI ID:5661540

Hard turning micro-machine tool

Patent · Tue Oct 22 00:00:00 EDT 2013 · OSTI ID:1107618

Related Subjects

42 ENGINEERING
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS

Flexure-based, tip-tilt-piston actuation micro-array

Citation Formats

References (9)

Similar Records

Related Subjects