Material Device and Integration Challenges for High-Frequency Piezoelectric Microresonators.

Nordquist, Christopher; Henry, Michael David; Branch, Darren W.; Esteves, Giovanni; Siddiqui, Aleem; Eichenfield, Matt; Reger, Robert William; Edstrand, Adam; Knisely, Katherine; Pluym, Tammy; Hummel, Gwendolyn; Griffin, Benjamin

Material Device and Integration Challenges for High-Frequency Piezoelectric Microresonators.

Conference · Tue Jan 01 04:00:00 EST 2019

OSTI ID:1595910

Nordquist, Christopher ^[1]; Henry, Michael David ^[1]; Branch, Darren W. ^[1]; Esteves, Giovanni ^[1]; Siddiqui, Aleem ^[1]; Eichenfield, Matt ^[1]; Reger, Robert William ^[1]; Edstrand, Adam ^[1]; Knisely, Katherine ^[1]; Pluym, Tammy ^[1]; Hummel, Gwendolyn; Griffin, Benjamin ^[1]

SNL

Abstract not provided.

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 1595910

Report Number(s):: SAND2019-0745C; 671786

Country of Publication:: United States

Language:: English

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Material Device and Integration Challenges for High-Frequency Piezoelectric Microresonators.

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