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The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.5129454· OSTI ID:1580320
 [1];  [1];  [1];  [1];  [1];  [1];  [1];  [1];  [1];  [2];  [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. SUNY Polytechnic Inst., Albany, NY (United States)
+ Show Author Affiliations
Hafnia is a high refractive index material used in the manufacturing of dielectric coatings for next generation lasers. The formation of defects during deposition is the major barrier to realizing high laser-damage resistant coatings for future high energy density laser applications. Understanding the precursors responsible for laser-induced damage in hafnia is therefore critical. In this work, we investigate the mechanism of laser-induced damage in 90-nm thick hafnia films produced by an oxygen assisted dual ion beam sputtering (IBS) process. Under pulsed, nanosecond ultraviolet laser exposure (355 nm, 8 ns), the laser-induced damage onset is found to be strongly dependent on the amount of argon and excessive oxygen entrapped in the nanobubbles within the hafnia films. The presence of nanobubbles is revealed and confirmed by small angle X-ray scattering and scanning/transmission electron microscopy coupled with high-angle annular dark-field. The damage onset is stable initially but decreases as the energy of oxygen goes beyond 100 eV. The damage initiation is ascribed to a laser-induced plasma generation within the nanobubbles through multiphoton ionization. The results reveal that nanobubbles formed in the IBS produced coatings are a potent precursor. Although nanobubbles are commonly present in IBS films, their negative impact on laser damage resistance of hafnia films has not been previously recognized. Furthermore, our findings provide a fundamental basis for the development of potential mitigation strategies required for the realization of laser damage resistant hafnia films.
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE; USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Scientific User Facilities Division
Grant/Contract Number:
AC02-06CH11357; AC52-07NA27344
OSTI ID:
1580320
Alternate ID(s):
OSTI ID: 1580137
OSTI ID: 1581822
Report Number(s):
LLNL-JRNL--789441; 987407
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 25 Vol. 115; ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

References (31)

Laser induced breakdown of Ar, N2 and O2 gases using 1.064, 0.532, 0.355 and 0.266 μm radiation journal December 1996
Argon solubility and diffusion in silica glass: Implications for the solution behavior of molecular gases journal January 1991
Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance journal October 1999
HfO2 films with high laser damage threshold journal January 2000
Non-destructive characterisation of porous low-k dielectric films journal October 2002
Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam journal February 1999
Ion beam sputtering of Ag – Angular and energetic distributions of sputtered and scattered particles
  • Feder, René; Bundesmann, Carsten; Neumann, Horst
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 316 https://doi.org/10.1016/j.nimb.2013.09.007
journal December 2013
Effects of structural defects on laser-induced damage of 355-nm high-reflective coatings sputtered on etched substrates journal March 2019
Real-time atomistic observation of structural phase transformations in individual hafnia nanorods journal May 2017
High dielectric constant oxides journal December 2004
Charged species profiles in oxygen plasma journal August 2000
Oxygen defect induced photoluminescence of HfO2 thin films journal July 2008
Near-ultraviolet absorption and nanosecond-pulse-laser damage in HfO 2 monolayers studied by submicrometer-resolution photothermal heterodyne imaging and atomic force microscopy journal June 2011
In situ controlled modification of the helium density in single helium-filled nanobubbles journal March 2014
Threshold characteristics of ultraviolet and near infrared nanosecond laser induced plasmas journal September 2016
Control of extended high-voltage electric discharges in atmospheric air by UV KrF-laser radiation journal March 2011
Laser-induced breakdown of gases journal May 1975
Frequency Dependence of Optically Induced GAS Breakdown journal November 1965
Wavelength Dependence of Laser-Induced Damage: Determining the Damage Initiation Mechanisms journal September 2003
Laser-induced damage of nodular defects in dielectric multilayer coatings journal December 2018
Research on the laser damage performance of high reflection coatings at 355 nm conference July 2013
Novel AMP surface treatment for improving optical fiber strength and laser gain (Conference Presentation)
  • VanBlarcom, Diana; Drachenberg, Derrek R.; Monticelli, Marcus V.
  • Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference https://doi.org/10.1117/12.2501563
conference January 2019
Laser damage resistance of hafnia thin films deposited by electron beam deposition, reactive low voltage ion plating, and dual ion beam sputtering journal November 2007
Searching for optimal mitigation geometries for laser-resistant multilayer high-reflector coatings journal January 2011
Investigation of the electronic and physical properties of defect structures responsible for laser-induced damage in DKDP crystals journal January 2010
Optical properties of oxygen vacancies in HfO 2 thin films studied by absorption and luminescence spectroscopy journal January 2018
Wavelength dependence of the mechanisms governing the formation of nanosecond laser-induced damage in fused silica journal January 2018
Influence of longitudinal mode beating on laser-induced damage in fused silica journal January 2014
Improving laser damage resistance of 355  nm high-reflective coatings by co-evaporated interfaces journal January 2016
Laser plasma-induced damage characteristics of Ta 2 O 5 films journal January 2019
Mechanisms of near-ultraviolet, nanosecond-pulse–laser damage in HfO2/SiO2-based multilayer coatings journal January 2013

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