Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication

Hobbs, Richard; Kim, Chungsoo; Agarwal, Akshay; Yang, Yang; Manfrinato, Vitor; Short, Michael P.; Li, Ju; Berggren, Karl K.

doi:10.1088/1361-6528/ab4a65

Title: Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication

Journal Article · Wed Oct 02 00:00:00 EDT 2019 · Nanotechnology

DOI:https://doi.org/10.1088/1361-6528/ab4a65· OSTI ID:1570233

^[1]; Kim, Chungsoo ^[2];

^[2]; Yang, Yang ^[3]; Manfrinato, Vitor ^[2]; Short, Michael P. ^[2]; Li, Ju ^[2];

^[2]

Trinity College Dublin, Dublin (Ireland). School of Chemistry
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report significant dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). In this work, we suggest that our approach and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.

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Research Organization:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1570233

Journal Information:: Nanotechnology, Vol. 31, Issue 4; ISSN 0957-4484

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 14 works

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