skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Selective growth of Al2O3 on size-selected platinum clusters by atomic layer deposition

Journal Article · · Surface Science
 [1];  [1];  [1];  [2];  [2];  [2];  [2]
  1. Univ. of Utah, Salt Lake City, UT (United States)
  2. Argonne National Lab. (ANL), Argonne, IL (United States)

In heterogeneous catalysis, atomic layer deposition (ALD) has been developed as a tool to stabilize and reduce carbon deposition on supported nanoparticles. Here, we discuss use of high vacuum ALD to deposit alumina films on size-selected, sub-nanometer Pt/SiO2 model catalysts. Mass-selected Pt24 clusters were deposited on oxidized Si(100), to form model Pt24/SiO2 catalysts with particles shown to be just under 1 nm, with multilayer three dimensional structure. Alternating exposures to trimethylaluminum and water vapor in an ultra-high vacuum chamber were used to grow alumina on the samples without exposing them to air. Here, the samples were probed in situ using X-ray photoelectron spectroscopy (XPS), low-energy ion scattering spectroscopy (ISS), and CO temperature-programmed desorption (TPD). Additional samples were prepared for ex situ experiments using grazing incidence small angle xray scattering spectroscopy (GISAXS). Alumina growth is found to initiate at least 60 times more efficiently at the Pt24 cluster sites, compared to bare SiO2/Si, with a single ALD cycle depositing a full alumina layer on top of the clusters, with substantial additional alumina growth initiating on SiO2 sites surrounding the clusters. As a result, the clusters were completely passivated, with no exposed Pt binding sites.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE Office of Science (SC); Air Force Research Laboratory (AFRL), Air Force Office of Scientific Research (AFOSR)
Grant/Contract Number:
AC02-06CH11357; FA9550-16-1-0141; FA9550-19-1-0261
OSTI ID:
1568770
Alternate ID(s):
OSTI ID: 1567910
Journal Information:
Surface Science, Vol. 691, Issue C; ISSN 0039-6028
Publisher:
ElsevierCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 10 works
Citation information provided by
Web of Science

References (50)

Coking- and Sintering-Resistant Palladium Catalysts Achieved Through Atomic Layer Deposition journal March 2012
Alumina Over-coating on Pd Nanoparticle Catalysts by Atomic Layer Deposition: Enhanced Stability and Reactivity journal January 2011
Stabilization of Copper Catalysts for Liquid-Phase Reactions by Atomic Layer Deposition journal November 2013
Atomic Layer Deposition Overcoating: Tuning Catalyst Selectivity for Biomass Conversion journal September 2014
Catalyst Design with Atomic Layer Deposition journal February 2015
ALD Functionalized Nanoporous Gold: Thermal Stability, Mechanical Properties, and Catalytic Activity journal August 2011
Surface Modification of Au/TiO 2 Catalysts by SiO 2 via Atomic Layer Deposition journal May 2008
Structural effects on trends in the deposition and dissolution of metal-supported metal adstructures journal August 2010
Effect of alloying on carbon formation during ethane dehydrogenation journal May 2009
Precisely Applying TiO 2 Overcoat on Supported Au Catalysts Using Atomic Layer Deposition for Understanding the Reaction Mechanism and Improved Activity in CO Oxidation journal December 2015
Revisiting the Au Particle Size Effect on TiO 2 -Coated Au/TiO 2 Catalysts in CO Oxidation Reaction journal April 2016
Reactivity of supported platinum nanoclusters studied by in situ GISAXS: clusters stability under hydrogen journal October 2006
Oxidative Decomposition of Methanol on Subnanometer Palladium Clusters: The Effect of Catalyst Size and Support Composition journal May 2010
Subnanometre platinum clusters as highly active and selective catalysts for the oxidative dehydrogenation of propane journal February 2009
Selective Propene Epoxidation on Immobilized Au 6-10 Clusters: The Effect of Hydrogen and Water on Activity and Selectivity journal February 2009
Inherent Size Effects on XANES of Nanometer Metal Clusters: Size-Selected Platinum Clusters on Silica journal December 2016
Boron Switch for Selectivity of Catalytic Dehydrogenation on Size-Selected Pt Clusters on Al 2 O 3 journal August 2017
Diborane Interactions with Pt 7 /Alumina: Preparation of Size-Controlled Borated Pt Model Catalysts journal January 2018
Preparation of Size- and Composition-Controlled Pt n Sn x /SiO 2 ( n = 4, 7, 24) Bimetallic Model Catalysts with Atomic Layer Deposition journal May 2019
Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry journal January 1997
Electron impact ionization and ion chemistry in trimethylaluminum and in trimethylgallium journal October 2000
New model for electron‐impact ionization cross sections of molecules journal February 1996
Cluster size effects on sintering, CO adsorption, and implantation in Ir/SiO2 journal September 2009
CO adsorption and desorption on size-selected Pd n /TiO 2 (110) model catalysts: Size dependence of binding sites and energies, and support-mediated adsorption journal May 2012
Simultaneous measurement of X-ray small angle scattering, absorption and reactivity: A continuous flow catalysis reactor
  • Lee, Sungsik; Lee, Byeongdu; Seifert, Soenke
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 649, Issue 1 https://doi.org/10.1016/j.nima.2010.12.172
journal September 2011
Irena : tool suite for modeling and analysis of small-angle scattering journal February 2009
Atomic subshell photoionization cross sections and asymmetry parameters: 1 ⩽ Z ⩽ 103 journal January 1985
Quartz Crystal Microbalance Studies of Al 2 O 3 Atomic Layer Deposition Using Trimethylaluminum and Water at 125 °C journal January 2010
Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition journal August 2002
Low-Temperature Al2O3 Atomic Layer Deposition journal February 2004
Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates journal June 2002
Direct Measurements of Half-Cycle Reaction Heats during Atomic Layer Deposition by Calorimetry journal October 2017
Effect of water dose on the atomic layer deposition rate of oxide thin films journal June 2000
Atomic layer epitaxy growth of aluminum oxide thin films from a novel Al(CH3)2Cl precursor and H2O
  • Kukli, Kaupo; Ritala, Mikko; Leskelä, Markku
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 15, Issue 4 https://doi.org/10.1116/1.580536
journal July 1997
Synchrotron radiation assisted deposition of aluminum oxide from condensed layers of trimethylaluminum and water at 78 K journal August 1992
Thermal Stability of Supported Platinum Clusters Studied by in Situ GISAXS journal November 2004
Oxygen activation and CO oxidation over size-selected Pt n /alumina/Re(0001) model catalysts: correlations with valence electronic structure, physical structure, and binding sites journal January 2014
Ethylene Dehydrogenation on Pt 4,7,8 Clusters on Al 2 O 3 : Strong Cluster Size Dependence Linked to Preferred Catalyst Morphologies journal April 2017
Thermal desorption of gases journal July 1962
Alumina support and Pdn cluster size effects on activity of Pdn for catalytic oxidation of CO journal January 2013
Effects of Alumina Thickness on CO Oxidation Activity over Pd 20 /Alumina/Re(0001): Correlated Effects of Alumina Electronic Properties and Pd 20 Geometry on Activity journal January 2015
Decomposition of trimethylaluminum on silicon(100) journal July 1989
Electronic Structure Controls Reactivity of Size-Selected Pd Clusters Adsorbed on TiO2 Surfaces journal November 2009
Understanding surface core-level shifts using the Auger parameter: A study of Pd atoms adsorbed on ultrathin SiO 2 films journal March 2014
Initial and Final State Effects in the Ultraviolet and X-ray Photoelectron Spectroscopy (UPS and XPS) of Size-Selected Pd n Clusters Supported on TiO 2 (110) journal March 2015
Mass-selected supported cluster catalysts: Size effects on CO oxidation activity, electronic structure, and thermal stability of Pdn/alumina (n≤30) model catalysts journal September 2014
A detailed TPD study of H2O and pre-adsorbed O on the stepped Pt(553) surface journal January 2011
In Situ Hard X-ray Photoelectron Study of O 2 and H 2 O Adsorption on Pt Nanoparticles journal May 2016
First-Principles Predictions and in Situ Experimental Validation of Alumina Atomic Layer Deposition on Metal Surfaces journal November 2014
Porous Alumina Protective Coatings on Palladium Nanoparticles by Self-Poisoned Atomic Layer Deposition journal May 2012

Cited By (2)

Sn-modification of Pt 7 /alumina model catalysts: Suppression of carbon deposition and enhanced thermal stability journal January 2020
Sn-modification of Pt7/alumina model catalysts: Suppression of carbon deposition and enhanced thermal stability text January 2020