Scratch resistant flexible transparent electrodes and methods for fabricating ultrathin metal films as electrodes

Patent · 11 June 2019

OSTI ID:1568463

Ren, Zhifeng; Guo, Chuanfei; Liu, Yuan

Systems and methods of fabricating electrodes, including thin metallic films, include depositing a first metallic layer on a substrate and passivating the deposited layer. The processes of deposition and passivation may be done sequentially. In some embodiments, a plurality of substrates may be coated with a metallic layer and further processed at a later time, including passivation and disposal of additional layers as discussed herein.

• Research Organization: Univ. of Houston, Houston, TX (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: FG02-00ER45805; SC0010831
• Assignee: University of Houston (Houston, TX)
• Patent Number(s): 10,319,489
• Application Number: 15/547,033
• OSTI ID: 1568463
• Country of Publication: United States
• Language: English